Akins; Robert P.

Patent Applications and Registrations

Patent applications and USPTO patent grants for Akins; Robert P..The latest application filed is for "method and system for managing light source operation".

Company Profile

0.10.7

Akins; Robert P. - Escondido CA
Akins; Robert P. - San Diego CA

*profile and listings may contain filings by different individuals or companies with the same name. Review application materials to confirm ownership/assignment.

Patent Activity

Patent	Date
Method and system for managing light source operation Grant 8,295,316 - Akins , et al. October 23, 2	2012-10-23
Method and System for Managing Light Source Operation App 20110235663 - Akins; Robert P. ; et al.	2011-09-29
System and methods for filtering out-of-band radiation in EUV exposure tools App 20090250637 - Akins; Robert P. ; et al.	2009-10-08
High repetition rate laser produced plasma EUV light source App 20080197297 - Akins; Robert P. ; et al.	2008-08-21
High repetition rate laser produced plasma EUV light source Grant 7,361,918 - Akins , et al. April 22, 2	2008-04-22
Systems and methods to shape laser light as a homogeneous line beam for interaction with a film deposited on a substrate Grant 7,317,179 - Akins , et al. January 8, 2	2008-01-08
Systems and methods to shape laser light as a homogeneous line beam for interaction with a film deposited on a substrate App 20070096008 - Akins; Robert P. ; et al.	2007-05-03
Web-based method for information services App 20070088794 - Akins; Robert P. ; et al.	2007-04-19
High repetition rate laser produced plasma EUV light source App 20070029511 - Akins; Robert P. ; et al.	2007-02-08
High repetition rate laser produced plasma EUV light source Grant 7,087,914 - Akins , et al. August 8, 2	2006-08-08
High repetition rate laser produced plasma EUV light source App 20050205810 - Akins, Robert P. ; et al.	2005-09-22
Apparatus for, and method of, maintaining a clean window in a laser Grant 5,359,620 - Akins October 25, 1	1994-10-25
Compact excimer laser Grant 5,048,041 - Akins , et al. September 10, 1	1991-09-10
Compact excimer laser Grant 5,033,055 - Akins , et al. July 16, 1	1991-07-16
Compact excimer laser Grant 5,023,884 - Akins , et al. June 11, 1	1991-06-11
Compact excimer laser Grant 5,018,161 - Akins , et al. May 21, 1	1991-05-21
Compact excimer laser including an electrode mounted in insulating relationship to wall of the laser Grant 4,959,840 - Akins , et al. September 25, 1	1990-09-25

Company Registrations

SEC

0001194631

AKINS ROBERT P

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