Akeno; Kiminobu
Patent Applications and Registrations
Patent applications and USPTO patent grants for Akeno; Kiminobu.The latest application filed is for "charged particle beam irradiation apparatus".
- Akeno; Kiminobu - Yokohama JP
- AKENO; Kiminobu - Yokohama-shi JP
- Akeno; Kiminobu - Kanagawa-ken JP
- Akeno; Kiminobu - Kanagawa JP
- Akeno, Kiminobu - Minato-ku JP
| Patent | Date |
|---|---|
| Dust-collecting apparatus Grant 11,266,999 - Takahashi , et al. March 8, 2 | 2022-03-08 |
| Charged particle beam irradiation apparatus Grant 11,049,688 - Kawaguchi , et al. June 29, 2 | 2021-06-29 |
| Charged Particle Beam Irradiation Apparatus App 20200105499 - KAWAGUCHI; Michihiro ; et al. | 2020-04-02 |
| Vibration control system and optical equipment equipped therewith Grant 10,607,810 - Kawaguchi , et al. | 2020-03-31 |
| Conductive contact point pin and charged particle beam apparatus Grant 10,373,793 - Kawaguchi , et al. | 2019-08-06 |
| Vibration Control System And Optical Equipment Equipped Therewith App 20190214224 - Kawaguchi; Michihiro ; et al. | 2019-07-11 |
| Dust-collecting Apparatus App 20190126290 - TAKAHASHI; Yosuke ; et al. | 2019-05-02 |
| Conductive Contact Point Pin and Charged Particle Beam Apparatus App 20180068824 - Kawaguchi; Michihiro ; et al. | 2018-03-08 |
| Charged particle beam drawing apparatus and charged particle beam drawing method Grant 8,987,683 - Kawaguchi , et al. March 24, 2 | 2015-03-24 |
| Charged Particle Beam Drawing Apparatus And Charged Particle Beam Drawing Method App 20140319373 - KAWAGUCHI; Michihiro ; et al. | 2014-10-30 |
| Charged particle beam writing apparatus and charged particle beam writing method Grant 8,847,178 - Kawaguchi , et al. September 30, 2 | 2014-09-30 |
| Substrate cover and charged particle beam writing method using same Grant 8,779,397 - Kawaguchi , et al. July 15, 2 | 2014-07-15 |
| Charged Particle Beam Writing Apparatus And Charged Particle Beam Writing Method App 20130082193 - KAWAGUCHI; Michihiro ; et al. | 2013-04-04 |
| Substrate Cover And Charged Particle Beam Writing Method Using Same App 20110155930 - KAWAGUCHI; Michihiro ; et al. | 2011-06-30 |
| Charged particle beam processing apparatus Grant 7,528,393 - Akeno May 5, 2 | 2009-05-05 |
| Alignment method Grant 7,075,621 - Mitsui , et al. July 11, 2 | 2006-07-11 |
| Charged particle beam processing apparatus App 20060076514 - Akeno; Kiminobu | 2006-04-13 |
| Alignment method App 20050128451 - Mitsui, Soichiro ; et al. | 2005-06-16 |
| Alignment apparatus for substrates Grant 6,901,314 - Mitsui , et al. May 31, 2 | 2005-05-31 |
| Charged particle beam system and chamber of charged particle beam system Grant 6,617,592 - Takamatsu , et al. September 9, 2 | 2003-09-09 |
| Charged particle beam system and chamber of charged particle beam system App 20010025931 - Takamatsu, Jun ; et al. | 2001-10-04 |
| Pattern evaluation apparatus and a method of pattern evaluation Grant 5,602,645 - Tabata , et al. February 11, 1 | 1997-02-11 |
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