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name:-0.0053651332855225
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Akbas; Mehmet Ali Patent Filings

Akbas; Mehmet Ali

Patent Applications and Registrations

Patent applications and USPTO patent grants for Akbas; Mehmet Ali.The latest application filed is for "lithographic apparatus, substrate table, and non-uniform coating method".

Company Profile
2.3.6
  • Akbas; Mehmet Ali - Cheshire CT
  • Akbas; Mehmet Ali - Wilton CT
*profile and listings may contain filings by different individuals or companies with the same name. Review application materials to confirm ownership/assignment.
Patent Activity
PatentDate
Substrate holder for use in a lithographic apparatus
Grant 11,448,976 - Poiesz , et al. September 20, 2
2022-09-20
Lithographic Apparatus, Substrate Table, And Non-uniform Coating Method
App 20220216092 - TIRRI; Bruce ;   et al.
2022-07-07
Laser Roughening: Engineering The Roughness Of The Burl Top
App 20220134480 - SOHRABIBABAHEIDARY; Damoon ;   et al.
2022-05-05
Burls with altered surface topography for holding an object in lithography applications
Grant 11,270,906 - Akbas , et al. March 8, 2
2022-03-08
A Method To Manufacture Nano Ridges In Hard Ceramic Coatings
App 20210405539 - AKBAS; Mehmet Ali ;   et al.
2021-12-30
Burls With Altered Surface Topography For Holding An Object In Lithography Applications
App 20210202293 - AKBAS; Mehmet Ali ;   et al.
2021-07-01
Substrate Holder For Use In A Lithographic Apparatus
App 20210165334 - POIESZ; Thomas ;   et al.
2021-06-03
Substrate holder and a method of manufacturing a substrate holder
Grant 10,719,019 - Poiesz , et al.
2020-07-21
A Substrate Holder And A Method Of Manufacturing A Substrate Holder
App 20190332015 - POIESZ; Thomas ;   et al.
2019-10-31

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