AKAO; Tokunobu

Patent Applications and Registrations

Patent applications and USPTO patent grants for AKAO; Tokunobu.The latest application filed is for "temperature sensor, heater unit, and substrate processing apparatus".

Company Profile

4.17.12

AKAO; Tokunobu - Toyama-shi JP
Akao; Tokunobu - Toyama JP
Akao; Tokunobu - Tokyo JP

*profile and listings may contain filings by different individuals or companies with the same name. Review application materials to confirm ownership/assignment.

Patent Activity

Patent	Date
Temperature Sensor, Heater Unit, And Substrate Processing Apparatus App 20220139737 - AKAO; Tokunobu ; et al.	2022-05-05
Substrate processing apparatus, and thermocouple Grant 11,300,456 - Osaka , et al. April 12, 2	2022-04-12
Substrate Processing Apparatus, And Thermocouple App 20220082447 - OSAKA; Akihiro ; et al.	2022-03-17
Temperature sensor Grant D924,701 - Akao July 13, 2	2021-07-13
Substrate Temperature Sensor, Substrate Retainer and Substrate Processing Apparatus App 20210181033 - AKAO; Tokunobu ; et al.	2021-06-17
Substrate processing apparatus, and thermocouple Grant 10,684,174 - Osaka , et al.	2020-06-16
Substrate Processing Apparatus, And Thermocouple App 20200166413 - OSAKA; Akihiro ; et al.	2020-05-28
Substrate processing apparatus, and thermocouple Grant 10,228,291 - Osaka , et al.	2019-03-12
Substrate Processing Apparatus, And Thermocouple App 20180328790 - OSAKA; Akihiro ; et al.	2018-11-15
Protector tube for thermocouple Grant D819,463 - Akao , et al. June 5, 2	2018-06-05
Protector tube for thermocouple Grant D818,850 - Akao , et al. May 29, 2	2018-05-29
Thermometry tool for substrate processing apparatus Grant D803,075 - Akao , et al. November 21, 2	2017-11-21
Substrate Processing Apparatus, And Thermocouple App 20160245704 - OSAKA; Akihiro ; et al.	2016-08-25
Substrate processing apparatus having rotatable slot-type antenna and method of manufacturing semiconductor device using the same Grant 8,987,645 - Ogawa , et al. March 24, 2	2015-03-24
Substrate processing apparatus Grant 8,795,433 - Akao , et al. August 5, 2	2014-08-05
Substrate processing apparatus and method of manufacturing a semiconductor device Grant 8,557,720 - Akao , et al. October 15, 2	2013-10-15
Substrate processing apparatus and method of manufacturing a semiconductor device Grant 8,486,222 - Akao , et al. July 16, 2	2013-07-16
Substrate Processing Apparatus And Method Of Manufacturing Semiconductor Device App 20120129358 - OGAWA; Unryu ; et al.	2012-05-24
Substrate Processing Apparatus And Method Of Manufacturing A Semiconductor Device App 20120108061 - AKAO; Tokunobu ; et al.	2012-05-03
Substrate Processing Apparatus And Method Of Manufacturing A Semiconductor Device App 20120108080 - AKAO; Tokunobu ; et al.	2012-05-03
Substrate processing apparatus App 20090229518 - Akao; Tokunobu ; et al.	2009-09-17
Data Logging Method App 20080288217 - Akao; Tokunobu	2008-11-20
Substrate processing device, substrate conveying device, and substrate processing method Grant 6,742,977 - Okayama , et al. June 1, 2	2004-06-01
Substrate processing apparatus and semiconductor manufacturing method App 20010035124 - Okayama, Satohiro ; et al.	2001-11-01
Substrate heating equipment for use in a semiconductor fabricating apparatus Grant 5,850,071 - Makiguchi , et al. December 15, 1	1998-12-15

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