Akaike; Yutaka
Patent Applications and Registrations
Patent applications and USPTO patent grants for Akaike; Yutaka.The latest application filed is for "method for controlling temperature of substrate support and inspection apparatus".
- Akaike; Yutaka - Nirasaki JP
- AKAIKE; Yutaka - Yamanashi JP
- AKAIKE; Yutaka - Nirasaki City JP
- Akaike; Yutaka - Minamikoma-gun JP
- AKAIKE; Yutaka - Nirasaki-shi Yamanashi
- AKAIKE; Yutaka - Yamanashi-ken JP
- Akaike; Yutaka - Nishiyatsushiro-gun JP
| Patent | Date |
|---|---|
| Wafer inspection device and maintenance method for same Grant 11,226,366 - Akaike , et al. January 18, 2 | 2022-01-18 |
| Method For Controlling Temperature Of Substrate Support And Inspection Apparatus App 20220015193 - KASAI; Shigeru ; et al. | 2022-01-13 |
| Dummy Wafer App 20210265183 - KASAI; Shigeru ; et al. | 2021-08-26 |
| Stage And Inspection Apparatus App 20210156890 - KOBAYASHI; Dai ; et al. | 2021-05-27 |
| Inspection Device App 20200386805 - KASAI; Shigeru ; et al. | 2020-12-10 |
| Punching apparatus Grant 10,307,929 - Akaike | 2019-06-04 |
| Wafer Inspection Device And Maintenance Method For Same App 20180364300 - AKAIKE; Yutaka ; et al. | 2018-12-20 |
| Sheet Punching Apparatus App 20180194032 - AKAIKE; Yutaka | 2018-07-12 |
| Substrate inspection apparatus and substrate temperature control method Grant 9,885,747 - Akaike , et al. February 6, 2 | 2018-02-06 |
| Punching Apparatus App 20170239834 - Akaike; Yutaka | 2017-08-24 |
| Heat Treatment Apparatus And Heat Treatment Method App 20160109508 - AKAIKE; Yutaka ; et al. | 2016-04-21 |
| Ceramic mounting for wafer apparatus with thermal expansion feature Grant 8,082,977 - Akaike , et al. December 27, 2 | 2011-12-27 |
| Transfer mechanism for target object to be inspected Grant 7,994,809 - Akaike , et al. August 9, 2 | 2011-08-09 |
| Image reading apparatus App 20110157666 - Hirokawa; Hiroyuki ; et al. | 2011-06-30 |
| Test device Grant 7,812,627 - Yamamoto , et al. October 12, 2 | 2010-10-12 |
| Transfer Mechanism For Target Object To Be Inspected App 20100001751 - Akaike; Yutaka ; et al. | 2010-01-07 |
| Substrate supporting unit, and substrate temperature control apparatus and method Grant 7,580,109 - Akaike August 25, 2 | 2009-08-25 |
| Image reading apparatus Grant 7,525,695 - Akaike April 28, 2 | 2009-04-28 |
| Test Device App 20090096475 - YAMAMOTO; Yasuhito ; et al. | 2009-04-16 |
| Mounting Apparatus App 20070221363 - AKAIKE; Yutaka ; et al. | 2007-09-27 |
| Substrate supporting unit, and substrate temperature control apparatus and method App 20060274298 - Akaike; Yutaka | 2006-12-07 |
| Image reading apparatus App 20040263918 - Akaike, Yutaka | 2004-12-30 |
| Drivingly rotatable mechanism of specimen loading table and specimen loading mechanism Grant 6,634,245 - Yoshioka , et al. October 21, 2 | 2003-10-21 |
| Probe Device App 20020011854 - KUJI, MOTOHIRO ; et al. | 2002-01-31 |
| Chuck device and chuck method App 20010013772 - Sugiyama, Masahiko ; et al. | 2001-08-16 |
| Probe apparatus Grant 5,912,555 - Akaike , et al. June 15, 1 | 1999-06-15 |
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