Akagawa; Masayuki

Patent Applications and Registrations

Patent applications and USPTO patent grants for Akagawa; Masayuki.The latest application filed is for "wafer processing apparatus with wafer alignment device".

Company Profile

0.5.4

Akagawa; Masayuki - Tokyo JP
Akagawa; Masayuki - Kawaguchi JP

*profile and listings may contain filings by different individuals or companies with the same name. Review application materials to confirm ownership/assignment.

Patent Activity

Patent	Date
Wafer processing apparatus with wafer alignment device Grant 7,963,736 - Takizawa , et al. June 21, 2	2011-06-21
Wafer Processing Apparatus With Wafer Alignment Device App 20090252580 - Takizawa; Masahiro ; et al.	2009-10-08
Optical apparatus, exposure apparatus using the same, and gas introduction method Grant 6,762,412 - Akagawa , et al. July 13, 2	2004-07-13
Optical device, method of cleaning the same, projection aligner, and method of producing the same App 20040008328 - Akagawa, Masayuki ; et al.	2004-01-15
Optical device, method of cleaning the same, projection aligner, and method of producing the same Grant 6,671,033 - Akagawa , et al. December 30, 2	2003-12-30
Optical device, method of cleaning the same, projection aligner, and method of producing the same App 20020109826 - Akagawa, Masayuki ; et al.	2002-08-15
Optical device, method for cleaning the same, projection aligner, and method of producing the same App 20010055099 - Akagawa, Masayuki ; et al.	2001-12-27
Optical device method of cleaning the same, projection aligner, and method of producing the same Grant 6,288,769 - Akagawa , et al. September 11, 2	2001-09-11
Wafer inspecting apparatus Grant 4,856,904 - Akagawa August 15, 1	1989-08-15

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