Akae; Naonori

Patent Applications and Registrations

Patent applications and USPTO patent grants for Akae; Naonori.The latest application filed is for "substrate processing apparatus and furnace opening cover".

Company Profile

5.50.43

Akae; Naonori - Toyama JP
AKAE; Naonori - Toyama-shi JP
Akae; Naonori - Imizu-shi JP
AKAE; Naonori - Toyama-shi Toyama

*profile and listings may contain filings by different individuals or companies with the same name. Review application materials to confirm ownership/assignment.

Patent Activity

Patent	Date
Substrate processing apparatus and furnace opening cover Grant 11,377,730 - Takagi , et al. July 5, 2	2022-07-05
Method of manufacturing semiconductor device, substrate processing apparatus, and recording medium Grant 10,513,775 - Yamakoshi , et al. Dec	2019-12-24
Substrate processing apparatus and guide portion Grant 10,513,774 - Terasaki , et al. Dec	2019-12-24
Substrate Processing Apparatus And Furnace Opening Cover App 20190017168 - TAKAGI; Kosuke ; et al.	2019-01-17
Gas Supply Nozzle, Substrate Processing Apparatus, And Non-transitory Computer-readable Recording Medium App 20180363137 - TAKAGI; Kosuke ; et al.	2018-12-20
Gas supply nozzle, substrate processing apparatus, and non-transitory computer-readable recording medium Grant 10,081,868 - Takagi , et al. September 25, 2	2018-09-25
Method of manufacturing semiconductor device and substrate processing apparatus Grant 9,966,251 - Sasajima , et al. May 8, 2	2018-05-08
Method of manufacturing semiconductor device and substrate processing apparatus Grant 9,966,252 - Sasajima , et al. May 8, 2	2018-05-08
Method of manufacturing semiconductor device Grant 9,905,413 - Yamakoshi , et al. February 27, 2	2018-02-27
Method Of Manufacturing Semiconductor Device, Substrate Processing Apparatus, And Recording Medium App 20170298508 - YAMAKOSHI; Risa ; et al.	2017-10-19
Method Of Manufacturing Semiconductor Device App 20170178889 - YAMAKOSHI; Risa ; et al.	2017-06-22
Method of manufacturing semiconductor device, method of processing substrate, substrate processing apparatus, and recording medium Grant 9,685,317 - Yuasa , et al. June 20, 2	2017-06-20
Substrate Processing Apparatus And Furnace Opening Cover App 20170088948 - TAKAGI; Kosuke ; et al.	2017-03-30
Method of manufacturing semiconductor device, including film having uniform thickness Grant 9,601,326 - Akae , et al. March 21, 2	2017-03-21
Gas Supply Nozzle, Substrate Processing Apparatus, And Non-transitory Computer-readable Recording Medium App 20170051408 - TAKAGI; Kosuke ; et al.	2017-02-23
Return nozzle Grant D773,609 - Morita , et al. December 6, 2	2016-12-06
Method of manufacturing semiconductor device Grant 9,508,546 - Toyoda , et al. November 29, 2	2016-11-29
Return nozzle Grant D771,543 - Morita , et al. November 15, 2	2016-11-15
Return nozzle Grant D771,772 - Morita , et al. November 15, 2	2016-11-15
Substrate Processing Apparatus And Guide Portion App 20160298235 - TERASAKI; Masato ; et al.	2016-10-13
Method of manufacturing semiconductor device, substrate processing apparatus, and recording medium Grant 9,425,075 - Sano , et al. August 23, 2	2016-08-23
Cleaning method, method of manufacturing semiconductor device, substrate processing apparatus and non-transitory computer-readable recording medium Grant 9,401,272 - Terasaki , et al. July 26, 2	2016-07-26
Substrate processing apparatus Grant 9,269,566 - Akae , et al. February 23, 2	2016-02-23
Substrate Processing Apparatus App 20160024650 - TOYODA; Kazuyuki ; et al.	2016-01-28
Method of manufacturing an oxynitride film for a semiconductor device Grant 9,196,473 - Ota , et al. November 24, 2	2015-11-24
Method of manufacturing semiconductor device, method of processing substrate and non-transitory computer readable recording medium Grant 9,190,264 - Yuasa , et al. November 17, 2	2015-11-17
Reaction tube Grant D739,832 - Yamazaki , et al. September 29, 2	2015-09-29
Method Of Manufacturing Semiconductor Device App 20150221503 - TOYODA; Kazuyuki ; et al.	2015-08-06
Method of manufacturing semiconductor device and substrate processing apparatus Grant 9,096,928 - Sasajima , et al. August 4, 2	2015-08-04
Method Of Manufacturing Semiconductor Device And Substrate Processing Apparatus App 20150214028 - SASAJIMA; Ryota ; et al.	2015-07-30
Method Of Manufacturing Semiconductor Device And Substrate Processing Apparatus App 20150214042 - SASAJIMA; Ryota ; et al.	2015-07-30
Method Of Manufacturing Semiconductor Device, Substrate Processing Apparatus And Non-transitory Computer-readable Recording Medium App 20150206736 - AKAE; Naonori ; et al.	2015-07-23
Substrate Processing Apparatus App 20150194302 - AKAE; Naonori ; et al.	2015-07-09
Method of manufacturing semiconductor device and substrate processing apparatus Grant 9,039,838 - Sasajima , et al. May 26, 2	2015-05-26
Substrate processing apparatus Grant 9,011,601 - Akae , et al. April 21, 2	2015-04-21
Reaction tube Grant D725,055 - Yamazaki , et al. March 24, 2	2015-03-24
Cleaning Method, Method Of Manufacturing Semiconductor Device, Substrate Processing Apparatus, And Recording Medium App 20150031216 - AKAE; Naonori ; et al.	2015-01-29
Substrate processing apparatus and method of manufacturing semiconductor device Grant 8,925,562 - Toyoda , et al. January 6, 2	2015-01-06
Reaction tube Grant D720,707 - Yamazaki , et al. January 6, 2	2015-01-06
Reaction tube Grant D719,114 - Yamazaki , et al. December 9, 2	2014-12-09
Substrate Processing Apparatus, Method Of Manufacturing Semiconductor Device, And Non-transitory Computer-readable Recording Medium App 20140357058 - TAKAGI; Kosuke ; et al.	2014-12-04
Method of manufacturing semiconductor device, substrate processing method, substrate processing apparatus and non-transitory computer readable recording medium Grant 8,901,014 - Ota , et al. December 2, 2	2014-12-02
Method for manufacturing semiconductor device and substrate processing apparatus Grant 8,895,455 - Akae , et al. November 25, 2	2014-11-25
Method of manufacturing semiconductor device and substrate processing apparatus Grant 8,895,457 - Akae , et al. November 25, 2	2014-11-25
Substrate Processing Apparatus App 20140318451 - AKAE; Naonori ; et al.	2014-10-30
Cleaning Method, Method Of Manufacturing Semiconductor Device, Substrate Processing Apparatus And Non-transitory Computer-readable Recording Medium App 20140287594 - TERASAKI; Masato ; et al.	2014-09-25
Reaction tube Grant D711,843 - Yamazaki , et al. August 26, 2	2014-08-26
Method of manufacturing semiconductor device and substrate processing apparatus Grant 8,809,204 - Akae , et al. August 19, 2	2014-08-19
Method Of Manufacturing Semiconductor Device, Substrate Processing Apparatus, And Recording Medium App 20140220788 - SANO; Atsushi ; et al.	2014-08-07
Method of manufacturing a semiconductor device, method of cleaning a process vessel, and substrate processing apparatus Grant 8,673,790 - Akae , et al. March 18, 2	2014-03-18
Method For Manufacturing Semiconductor Device And Substrate Processing Apparatus App 20140065840 - AKAE; Naonori ; et al.	2014-03-06
Method Of Manufacturing Semiconductor Device, Method Of Processing Substrate And Substrate Processing Apparatus App 20130337660 - Ota; Yosuke ; et al.	2013-12-19
Method for manufacturing semiconductor device and substrate processing apparatus Grant 8,609,551 - Akae , et al. December 17, 2	2013-12-17
Method Of Manufacturing Semiconductor Device, Method Of Processing Substrate, Substrate Processing Apparatus, And Recording Medium App 20130252434 - YUASA; Kazuhiro ; et al.	2013-09-26
Manufacturing method of semiconductor substrate and substrate processing apparatus Grant 8,524,580 - Akae , et al. September 3, 2	2013-09-03
Method of manufacturing semiconductor device, method of processing substrate and substrate processing apparatus Grant 8,415,258 - Akae , et al. April 9, 2	2013-04-09
Method Of Manufacturing Semiconductor Device, Method Of Processing Substrate, Substrate Processing Apparatus And Non-transitory Computer Readable Recording Medium App 20130084712 - YUASA; Kazuhiro ; et al.	2013-04-04
Method Of Manufacturing Semiconductor Device, Substrate Processing Method, Substrate Processing Apparatus And Non-transitory Computer Readable Recording Medium App 20130072027 - OTA; Yosuke ; et al.	2013-03-21
Method Of Manufacturing Semiconductor Device And Substrate Processing Apparataus App 20130059451 - AKAE; Naonori ; et al.	2013-03-07
Method of forming an insulation film having low impurity concentrations Grant 8,367,557 - Akae , et al. February 5, 2	2013-02-05
Method Of Manufacturing Semiconductor Device And Substrate Processing Apparatus App 20130017685 - Akae; Naonori ; et al.	2013-01-17
Method of manufacturing semiconductor device, method of processing substrate, and substrate processing apparatus Grant 8,252,701 - Sasajima , et al. August 28, 2	2012-08-28
Method of manufacturing semiconductor device, method of processing substrate, and substrate processing apparatus Grant 8,202,809 - Ota , et al. June 19, 2	2012-06-19
Method Of Manufacturing Semiconductor Device And Substrate Processing Apparatus App 20120064733 - SASAJIMA; Ryota ; et al.	2012-03-15
Method Of Manufacturing Semiconductor Device, Method Of Processing Substrate And Substrate Processing Apparatus App 20120045905 - AKAE; Naonori ; et al.	2012-02-23
Method Of Manufacturing A Semiconductor Device, Method Of Cleaning A Process Vessel, And Substrate Processing Apparatus App 20110318937 - AKAE; Naonori ; et al.	2011-12-29
Method Of Manufacturing Semiconductor Device, Method Of Processing Substrate, And Substrate Processing Apparatus App 20110318940 - OTA; Yosuke ; et al.	2011-12-29
Method of manufacturing semiconductor device, method of processing substrate and substrate processing apparatus Grant 8,076,251 - Akae , et al. December 13, 2	2011-12-13
Method Of Manufacturing Semiconductor Device, Method Of Processing Substrate, And Substrate Processing Apparatus App 20110130011 - SASAJIMA; Ryota ; et al.	2011-06-02
Method Of Manufacturing Semiconductor Device, Method Of Processing Substrate, And Substrate Processing Apparatus App 20110124204 - Ota; Yosuke ; et al.	2011-05-26
Method Of Manufacturing Semiconductor Device And Substrate Processing Apparatus App 20110076857 - AKAE; Naonori ; et al.	2011-03-31
Manufacturing method of semiconductor substrate and substrate processing apparatus App 20100190348 - Akae; Naonori ; et al.	2010-07-29
Semiconductor Device Manufacturing Method and Substrate Processing Apparatus App 20100136773 - Akae; Naonori ; et al.	2010-06-03
Method of Manufacturing Semiconductor Device and Substrate Processing Apparatus App 20100105192 - Akae; Naonori ; et al.	2010-04-29
Method for manufacturing semiconductor device and substrate processing apparatus App 20090170345 - Akae; Naonori ; et al.	2009-07-02
Method for Manufacturing Semiconductor Device and Substrate Processing Apparatus App 20090114146 - Takasawa; Yushin ; et al.	2009-05-07
Method of producing semiconductor device, and substrate processing apparatus App 20090117714 - Akae; Naonori ; et al.	2009-05-07
Manufacturing Method Of Semiconductor Device And Substrate Processing Apparatus App 20080268644 - Kameda; Kenji ; et al.	2008-10-30

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