Akada; Hikaru

Patent Applications and Registrations

Patent applications and USPTO patent grants for Akada; Hikaru.The latest application filed is for "processing liquid supply system, processing liquid supply apparatus, and carrier storage apparatus".

Company Profile

2.6.7

Akada; Hikaru - Koshi JP
Akada; Hikaru - Kumamoto JP
AKADA; Hikaru - Koshi City JP
Akada; Hikaru - Koshi-Shi JP

*profile and listings may contain filings by different individuals or companies with the same name. Review application materials to confirm ownership/assignment.

Patent Activity

Patent	Date
Substrate treatment apparatus Grant 11,217,468 - Akada January 4, 2	2022-01-04
Processing Liquid Supply System, Processing Liquid Supply Apparatus, And Carrier Storage Apparatus App 20200357630 - Hashimoto; Kazuya ; et al.	2020-11-12
Substrate Treatment Apparatus, Method For Installing Substrate Treatment Apparatus, And Computer Storage Medium App 20190172741 - AKADA; Hikaru	2019-06-06
Data acquisition method of substrate processing apparatus and sensing substrate Grant 9,915,677 - Akada March 13, 2	2018-03-13
Method for obtaining data of substrate processing apparatus and sensor substrate Grant 9,389,242 - Akada July 12, 2	2016-07-12
Data acquisition method in substrate processing apparatus and sensor substrate Grant 9,268,739 - Akada February 23, 2	2016-02-23
Method For Obtaining Data Of Substrate Processing Apparatus And Sensor Substrate App 20130346018 - AKADA; Hikaru	2013-12-26
Data Acquisition Method In Substrate Processing Apparatus And Sensor Substrate App 20130080099 - Akada; Hikaru	2013-03-28
Data Acquisition Method Of Substrate Processing Apparatus And Sensing Substrate App 20130006547 - AKADA; Hikaru	2013-01-03
Data Acquisition Method Of Substrate Treatment Apparatus And Sensor Substrate App 20120084059 - AKADA; Hikaru	2012-04-05

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