AITA; Michitaka
Patent Applications and Registrations
Patent applications and USPTO patent grants for AITA; Michitaka.The latest application filed is for "film formation method and film formation device".
- AITA; Michitaka - Nirasaki-shi Yamanashi
- Aita; Michitaka - Nirasaki JP
- Aita; Michitaka - Yamanashi JP
- Aita; Michitaka - Miyagi JP
- AITA; Michitaka - Nirasaki City JP
- Aita; Michitaka - Sendai JP
- AITA; Michitaka - Sendai City JP
| Patent | Date |
|---|---|
| Film Formation Method And Film Formation Device App 20220178031 - AITA; Michitaka ; et al. | 2022-06-09 |
| Gas distribution device and processing apparatus Grant 10,815,568 - Kabe , et al. October 27, 2 | 2020-10-27 |
| Plasma processing apparatus Grant 10,665,428 - Aita , et al. | 2020-05-26 |
| Plasma processing apparatus Grant 10,504,698 - Kohno , et al. Dec | 2019-12-10 |
| Selective film forming method and method of manufacturing semiconductor device Grant 10,490,443 - Kawano , et al. Nov | 2019-11-26 |
| Gas Distribution Device And Processing Apparatus App 20190256976 - KABE; Takumi ; et al. | 2019-08-22 |
| Plasma processing apparatus Grant 10,312,057 - Kohno , et al. | 2019-06-04 |
| Selective Film Forming Method and Method of Manufacturing Semiconductor Device App 20190096750 - KAWANO; Yumiko ; et al. | 2019-03-28 |
| Microwave Plasma Processing Apparatus And Microwave Plasma Processing Method App 20170358835 - Nakanishi; Toshio ; et al. | 2017-12-14 |
| Plasma processing apparatus Grant 9,761,418 - Shintaku , et al. September 12, 2 | 2017-09-12 |
| Plasma Processing Apparatus App 20170229286 - AITA; Michitaka ; et al. | 2017-08-10 |
| Plasma processing apparatus, power supply unit and mounting table system Grant 9,646,867 - Konno , et al. May 9, 2 | 2017-05-09 |
| Plasma processing apparatus Grant 9,574,270 - Yoshikawa , et al. February 21, 2 | 2017-02-21 |
| Plasma Processing Apparatus App 20160358756 - AITA; Michitaka ; et al. | 2016-12-08 |
| Plasma processing apparatus Grant 9,343,270 - Nozawa , et al. May 17, 2 | 2016-05-17 |
| Plasma Processing Apparatus App 20160126114 - KOHNO; Masayuki ; et al. | 2016-05-05 |
| Plasma Processing Apparatus App 20160118224 - KOHNO; Masayuki ; et al. | 2016-04-28 |
| Plasma processing method and plasma processing apparatus Grant 9,324,542 - Matsumoto , et al. April 26, 2 | 2016-04-26 |
| Plasma Processing Apparatus And Plasma Processing Method App 20150294839 - TAKABA; Hiroyuki ; et al. | 2015-10-15 |
| Plasma Processing Method And Plasma Processing Apparatus App 20150228459 - Matsumoto; Naoki ; et al. | 2015-08-13 |
| Plasma Processing Apparatus App 20150211125 - YOSHIKAWA; Jun ; et al. | 2015-07-30 |
| Plasma Processing Apparatus, Power Supply Unit And Mounting Table System App 20150109716 - KONNO; Masahiko ; et al. | 2015-04-23 |
| Plasma Processing Apparatus App 20150107773 - SHINTAKU; Masayuki ; et al. | 2015-04-23 |
| Plasma Processing Apparatus App 20140238607 - NOZAWA; Toshihisa ; et al. | 2014-08-28 |
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