Aida; Koei
Patent Applications and Registrations
Patent applications and USPTO patent grants for Aida; Koei.The latest application filed is for "gas supply unit and substrate processing apparatus including gas supply unit".
- Aida; Koei - Hachioji-shi JP
- Aida; Koei - Hachioji JP
- Aida; Koei - Tokyo JP
| Patent | Date |
|---|---|
| Gas Supply Unit And Substrate Processing Apparatus Including Gas Supply Unit App 20220108876 - Aida; Koei | 2022-04-07 |
| Heater block Grant D799,646 - Aida October 10, 2 | 2017-10-10 |
| Shower plate having different aperture dimensions and/or distributions Grant 8,845,806 - Aida , et al. September 30, 2 | 2014-09-30 |
| Shower Plate Having Different Aperture Dimensions and/or Distributions App 20120100307 - Aida; Koei ; et al. | 2012-04-26 |
| Wafer Lift Pins Suspended And Supported At Underside Of Susceptor App 20100101491 - Aida; Koei | 2010-04-29 |
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