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Copper electroplating method, pure copper anode for copper electroplating, and semiconductor wafer plated thereby with little particle adhesion Grant 7,648,621 - Aiba , et al. January 19, 2 | 2010-01-19 |
Electrolytic Copper Plating Method, Pure Copper Anode for Electrolytic Copper Plating, and Semiconductor Wafer having Low Particle Adhesion Plated with said Method and Anode App 20100000871 - Aiba; Akihiro ;   et al. | 2010-01-07 |
Electroless Palladium Plating Liquid App 20090081369 - Aiba; Akihiro ;   et al. | 2009-03-26 |
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Electrolytic copper plating method, phosphorous copper anode for electrolytic plating method, and semiconductor wafer having low particle adhesion plated with said method and anode Grant 7,138,040 - Okabe , et al. November 21, 2 | 2006-11-21 |
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Electrolytic cooper plating method, phosphorus-containing anode for electrolytic cooper plating, and semiconductor wafer plated using them and having few particles adhering to it App 20040149588 - Aiba, Akihiro ;   et al. | 2004-08-05 |
Electrolytic copper plating method, phosphorous copper anode for electrolytic plating method, and semiconductor wafer having low particle adhesion plated with said method and anode App 20040007474 - Okabe, Takeo ;   et al. | 2004-01-15 |