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Patent applications and USPTO patent grants for Ahrens; Marco.The latest application filed is for "lithography mask for imaging of convex structures".
Patent | Date |
---|---|
Lithography mask for imaging of convex structures Grant 7,354,683 - Moukara , et al. April 8, 2 | 2008-04-08 |
Lithography mask for imaging of convex structures App 20050095512 - Moukara, Molela ;   et al. | 2005-05-05 |
OPC method for generating corrected patterns for a phase-shifting mask and its trimming mask and associated device and integrated circuit configuration Grant 6,664,010 - Ahrens , et al. December 16, 2 | 2003-12-16 |
OPC method for generating corrected patterns for a phase-shifting mask and its trimming mask and associated device and integrated circuit configuration App 20020071997 - Ahrens, Marco ;   et al. | 2002-06-13 |
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