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Patent applications and USPTO patent grants for Aggarwal; Tanuj.The latest application filed is for "lithography system bandwidth control".
Patent | Date |
---|---|
Online calibration for repetition rate dependent performance variables Grant 11,050,213 - Thornes , et al. June 29, 2 | 2021-06-29 |
Lithography System Bandwidth Control App 20210021094 - Aggarwal; Tanuj | 2021-01-21 |
Gas optimization in a gas discharge light source Grant 10,892,594 - Aggarwal January 12, 2 | 2021-01-12 |
Lithography system bandwidth control Grant 10,833,471 - Aggarwal November 10, 2 | 2020-11-10 |
Online Calibration For Repetition Rate Dependent Performance Variables App 20200321746 - Thornes; Joshua Jon ;   et al. | 2020-10-08 |
Online calibration for repetition rate dependent performance variables Grant 10,727,642 - Thornes , et al. | 2020-07-28 |
Lithographic apparatus and method Grant 10,627,724 - Everts , et al. | 2020-04-21 |
Gas Optimization In A Gas Discharge Light Source App 20190190229 - Aggarwal; Tanuj | 2019-06-20 |
Lithography System Bandwidth Control App 20190155170 - Aggarwal; Tanuj | 2019-05-23 |
Gas optimization in a gas discharge light source Grant 10,218,147 - Aggarwal Feb | 2019-02-26 |
Method for dither free adaptive and robust dose control for photolithography Grant 10,096,969 - Aggarwal October 9, 2 | 2018-10-09 |
Gas mixture control in a gas discharge light source Grant 10,090,629 - Ahlawat , et al. October 2, 2 | 2018-10-02 |
Lithographic Apparatus And Method App 20180253014 - EVERTS; Frank ;   et al. | 2018-09-06 |
Estimating a gain relationship of an optical source Grant 10,036,963 - Aggarwal July 31, 2 | 2018-07-31 |
Controller for an optical system Grant 9,939,732 - Aggarwal April 10, 2 | 2018-04-10 |
Estimating A Gain Relationship Of An Optical Source App 20180074412 - Aggarwal; Tanuj | 2018-03-15 |
Online Calibration For Repetition Rate Dependent Performance Variables App 20180006425 - Thornes; Joshua Jon ;   et al. | 2018-01-04 |
Gas mixture control in a gas discharge light source Grant 9,819,136 - Ahlawat , et al. November 14, 2 | 2017-11-14 |
Online calibration for repetition rate dependent performance variables Grant 9,762,023 - Thornes , et al. September 12, 2 | 2017-09-12 |
Gas Optimization In A Gas Discharge Light Source App 20170237224 - Aggarwal; Tanuj | 2017-08-17 |
Gas Mixture Control In A Gas Discharge Light Source App 20170229832 - Ahlawat; Rahul ;   et al. | 2017-08-10 |
Gas Mixture Control In A Gas Discharge Light Source App 20170201057 - Ahlawat; Rahul ;   et al. | 2017-07-13 |
Online Calibration For Repetition Rate Dependent Performance Variables App 20170179677 - THORNES; Joshua Jon ;   et al. | 2017-06-22 |
Controller For An Optical System App 20170115575 - Aggarwal; Tanuj | 2017-04-27 |
Gas optimization in a gas discharge light source Grant 9,634,455 - Aggarwal April 25, 2 | 2017-04-25 |
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