Aggarwal; Ravinder
Patent Applications and Registrations
Patent applications and USPTO patent grants for Aggarwal; Ravinder.The latest application filed is for "self-centering susceptor ring assembly".
Company Profile
0.36.39
- Aggarwal; Ravinder - Gilbert AZ
- Aggarwal; Ravinder - Dr. Gilbert AZ
Patent Activity
| Patent | Date |
|---|---|
| Self-centering susceptor ring assembly Grant 11,387,137 - Aggarwal , et al. July 12, 2 | 2022-07-12 |
| Self-centering Susceptor Ring Assembly App 20220172980 - Aggarwal; Ravinder ; et al. | 2022-06-02 |
| Reaction apparatus having multiple adjustable exhaust ports Grant 9,551,069 - Aggarwal , et al. January 24, 2 | 2017-01-24 |
| Self-centering Susceptor Ring Assembly App 20140338596 - Aggarwal; Ravinder ; et al. | 2014-11-20 |
| Self-centering susceptor ring assembly Grant 8,801,857 - Aggarwal , et al. August 12, 2 | 2014-08-12 |
| Thermocouple Grant 8,616,765 - Darabnia , et al. December 31, 2 | 2013-12-31 |
| Substrate reactor with adjustable injectors for mixing gases within reaction chamber Grant 8,486,191 - Aggarwal , et al. July 16, 2 | 2013-07-16 |
| Load lock having secondary isolation chamber Grant 8,440,048 - Aggarwal , et al. May 14, 2 | 2013-05-14 |
| Susceptor ring Grant 8,394,229 - Aggarwal , et al. March 12, 2 | 2013-03-12 |
| Thermocouple App 20120310440 - Darabnia; Buz ; et al. | 2012-12-06 |
| Thermocouple Grant 8,262,287 - Darabnia , et al. September 11, 2 | 2012-09-11 |
| Reaction Apparatus Having Multiple Adjustable Exhaust Ports App 20120031340 - Aggarwal; Ravinder ; et al. | 2012-02-09 |
| Substrate support system for reduced autodoping and backside deposition Grant 8,088,225 - Goodman , et al. January 3, 2 | 2012-01-03 |
| Reaction apparatus having multiple adjustable exhaust ports Grant 8,067,061 - Aggarwal , et al. November 29, 2 | 2011-11-29 |
| Calibration of temperature control system for semiconductor processing chamber Grant 8,047,706 - Goodman , et al. November 1, 2 | 2011-11-01 |
| Redundant temperature sensor for semiconductor processing chambers Grant 7,993,057 - Aggarwal , et al. August 9, 2 | 2011-08-09 |
| Thermocouple App 20100284438 - Aggarwal; Ravinder ; et al. | 2010-11-11 |
| Substrate Reactor With Adjustable Injectors For Mixing Gases Within Reaction Chamber App 20100255658 - Aggarwal; Ravinder ; et al. | 2010-10-07 |
| Load Lock Having Secondary Isolation Chamber App 20100190343 - Aggarwal; Ravinder ; et al. | 2010-07-29 |
| Thermocouple App 20100145547 - Darabnia; Buz ; et al. | 2010-06-10 |
| Movable radiant heat sources Grant 7,725,012 - Aggarwal , et al. May 25, 2 | 2010-05-25 |
| Self-centering Susceptor Ring Assembly App 20100107973 - Aggarwal; Ravinder ; et al. | 2010-05-06 |
| Substrate Support System For Reduced Autodoping And Backside Deposition App 20100089314 - Goodman; Matt G. ; et al. | 2010-04-15 |
| Susceptor Ring App 20100031884 - AGGARWAL; RAVINDER ; et al. | 2010-02-11 |
| Substrate support system for reduced autodoping and backside deposition Grant 7,648,579 - Goodman , et al. January 19, 2 | 2010-01-19 |
| Susceptor ring Grant D600,223 - Aggarwal , et al. September 15, 2 | 2009-09-15 |
| Substrate handling chamber with movable substrate carrier loading platform Grant 7,585,142 - Aggarwal , et al. September 8, 2 | 2009-09-08 |
| Redundant Temperature Sensor For Semiconductor Processing Chambers App 20090159000 - Aggarwal; Ravinder ; et al. | 2009-06-25 |
| Calibration Of Temperature Control System For Semiconductor Processing Chamber App 20090147819 - GOODMAN; MATTHEW G. ; et al. | 2009-06-11 |
| Reaction Apparatus Having Multiple Adjustable Exhaust Ports App 20090110826 - AGGARWAL; RAVINDER ; et al. | 2009-04-30 |
| Reactor With Small Linear Lamps For Localized Heat Control And Improved Temperature Uniformity App 20090101633 - Aggarwal; Ravinder ; et al. | 2009-04-23 |
| Substrate handling chamber with movable substrate carrier loading platform App 20080226428 - Aggarwal; Ravinder ; et al. | 2008-09-18 |
| Movable radiant heat sources App 20080175571 - Aggarwal; Ravinder ; et al. | 2008-07-24 |
| Semiconductor wafer cooling device App 20070209593 - Aggarwal; Ravinder ; et al. | 2007-09-13 |
| Semiconductor processing apparatus with multiple exhaust paths App 20070207625 - Aggarwal; Ravinder ; et al. | 2007-09-06 |
| High temperature drop-off of a substrate Grant 7,231,141 - Jacobson , et al. June 12, 2 | 2007-06-12 |
| Slit valve for a semiconductor processing system Grant 7,159,846 - Aggarwal , et al. January 9, 2 | 2007-01-09 |
| Non-contact cool-down station for wafers Grant 7,147,720 - Aggarwal , et al. December 12, 2 | 2006-12-12 |
| Fabrication pathway integrated metrology device App 20060154385 - Aggarwal; Ravinder | 2006-07-13 |
| Loadlock with integrated pre-clean chamber Grant 7,018,504 - Raaijmakers , et al. March 28, 2 | 2006-03-28 |
| Load port with manual FOUP door opening mechanism App 20060045663 - Aggarwal; Ravinder ; et al. | 2006-03-02 |
| Substrate support system for reduced autodoping and backside deposition App 20050193952 - Goodman, Matt G. ; et al. | 2005-09-08 |
| Slit valve for a semiconductor processing system App 20050184270 - Aggarwal, Ravinder ; et al. | 2005-08-25 |
| Two-stage load for processing both sides of a wafer App 20050176252 - Goodman, Matthew G. ; et al. | 2005-08-11 |
| Semiconductor processing tool front end interface with sealing capability App 20050169730 - Aggarwal, Ravinder ; et al. | 2005-08-04 |
| Non-contact cool-down station for wafers App 20050145180 - Aggarwal, Ravinder ; et al. | 2005-07-07 |
| Front opening unified pod Grant 6,899,145 - Aggarwal May 31, 2 | 2005-05-31 |
| Non-contact Cool-down Station For Wafers App 20050091992 - Aggarwal, Ravinder ; et al. | 2005-05-05 |
| Non-contact cool-down station for wafers Grant 6,883,250 - Aggarwal , et al. April 26, 2 | 2005-04-26 |
| Slit valve for a semiconductor processing system Grant 6,883,776 - Aggarwal , et al. April 26, 2 | 2005-04-26 |
| Localized heating of substrates using optics Grant 6,879,777 - Goodman , et al. April 12, 2 | 2005-04-12 |
| Front opening unified pod App 20040182472 - Aggarwal, Ravinder | 2004-09-23 |
| Localized heating of substrates using optics App 20040067052 - Goodman, Matthew G. ; et al. | 2004-04-08 |
| System for the improved handling of wafers within a process tool App 20040062627 - Aggarwal, Ravinder ; et al. | 2004-04-01 |
| High temperature drop-off of a substrate Grant 6,704,496 - Jacobson , et al. March 9, 2 | 2004-03-09 |
| High temperature drop-off of a substrate App 20040043575 - Jacobson, Paul ; et al. | 2004-03-04 |
| Slit valve for a semiconductor processing system App 20040036053 - Aggarwal, Ravinder ; et al. | 2004-02-26 |
| System for the improved handling of wafers within a process tool Grant 6,696,367 - Aggarwal , et al. February 24, 2 | 2004-02-24 |
| Wafer handler App 20030234548 - Aggarwal, Ravinder | 2003-12-25 |
| Transfer chamber with integral loadlock and staging station App 20030194298 - Aggarwal, Ravinder ; et al. | 2003-10-16 |
| Transfer chamber with integral loadlock and staging station Grant 6,609,869 - Aggarwal , et al. August 26, 2 | 2003-08-26 |
| High temperature drop-off of a substrate App 20030070758 - Jacobson, Paul ; et al. | 2003-04-17 |
| Wafer buffering system App 20020153578 - Aggarwal, Ravinder ; et al. | 2002-10-24 |
| High temperature drop-off of a substrate App 20020155669 - Jacobson, Paul ; et al. | 2002-10-24 |
| Transfer chamber with integral loadlock and staging station App 20020085899 - Aggarwal, Ravinder ; et al. | 2002-07-04 |
| Wafer holder Grant 6,242,718 - Ferro , et al. June 5, 2 | 2001-06-05 |
| Substrate handling chamber App 20010000759 - Doley, Allan ; et al. | 2001-05-03 |
| Stackable cassette for use with wafer cassettes Grant 6,162,006 - Stevens , et al. December 19, 2 | 2000-12-19 |
| Multi-stage single-drive FOUP door system Grant 6,042,324 - Aggarwal , et al. March 28, 2 | 2000-03-28 |
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