| Patent | Date |
|---|
Use Of Vacuum During Transfer Of Substrates
App 20220305601 - CHANDRASEKHARAN; Ramesh ; et al. | 2022-09-29 |
Dynamic Process Control In Semiconductor Manufacturing
App 20220293442 - Kumar; Purushottam ; et al. | 2022-09-15 |
Temperature Control Of A Multi-zone Pedestal
App 20220243332 - CHANDRASEKHARAN; Ramesh ; et al. | 2022-08-04 |
Use Of Rotation To Correct For Azimuthal Non-uniformities In Semiconductor Substrate Processing
App 20220243323 - CHANDRASEKHARAN; Ramesh ; et al. | 2022-08-04 |
Rapid Tuning Of Critical Dimension Non-uniformity By Modulating Temperature Transients Of Multi-zone Substrate Supports
App 20220223440 - KUMAR; Ravi ; et al. | 2022-07-14 |
Modulated Atomic Layer Deposition
App 20220208543 - Soe; Chan Myae Myae ; et al. | 2022-06-30 |
Trim And Deposition Profile Control With Multi-zone Heated Substrate Support For Multi-patterning Processes
App 20220205105 - CHANDRASEKHARAN; Ramesh ; et al. | 2022-06-30 |
Apparatus For Cleaning Plasma Chambers
App 20220181128 - LAVOIE; Adrien ; et al. | 2022-06-09 |
Controller for controlling core critical dimension variation using flash trim sequence
Grant 11,322,416 - Agarwal , et al. May 3, 2 | 2022-05-03 |
Multi zone substrate support for ALD film property correction and tunability
Grant 11,236,422 - Roberts , et al. February 1, 2 | 2022-02-01 |
Methods For Representing And Storing Data In A Graph Data Structure Using Artificial Intelligence
App 20220027410 - Agarwal; Pulkit ; et al. | 2022-01-27 |
Azimuthal critical dimension non-uniformity for double patterning process
Grant 11,078,570 - Agarwal , et al. August 3, 2 | 2021-08-03 |
Method Of Improving Deposition Induced Cd Imbalance Using Spatially Selective Ashing Of Carbon Based Film
App 20210202250 - KARIM; Ishtak ; et al. | 2021-07-01 |
Operative Enterprise Application Recommendation Generated By Cognitive Services From Unstructured Requirements
App 20210125082 - Chakrabarty; Santanu ; et al. | 2021-04-29 |
Method of improving deposition induced CD imbalance using spatially selective ashing of carbon based film
Grant 10,978,302 - Karim , et al. April 13, 2 | 2021-04-13 |
Method And Apparatus For Providing Station To Station Uniformity
App 20200407847 - LAVOIE; Adrien ; et al. | 2020-12-31 |
Compensating chamber and process effects to improve critical dimension variation for trim process
Grant 10,847,352 - Agarwal , et al. November 24, 2 | 2020-11-24 |
Operative Enterprise Application Recommendation Generated By Cognitive Services From Unstructured Requirements
App 20200356866 - Chakrabarty; Santanu ; et al. | 2020-11-12 |
Controller for Controlling Core Critical Dimension Variation Using Flash Trim Sequence
App 20200350219 - Agarwal; Pulkit ; et al. | 2020-11-05 |
Method and apparatus for providing station to station uniformity
Grant 10,801,109 - Lavoie , et al. October 13, 2 | 2020-10-13 |
Method for controlling core critical dimension variation using flash trim sequence
Grant 10,727,143 - Agarwal , et al. | 2020-07-28 |
Method and Apparatus for cleaning a substrate
App 20200230782 - AGARWAL; Pulkit ; et al. | 2020-07-23 |
Dielectric gapfill of high aspect ratio features utilizing a sacrificial etch cap layer
Grant 10,658,172 - Abel , et al. | 2020-05-19 |
Conical wafer centering and holding device for semiconductor processing
Grant 10,655,224 - Agarwal , et al. | 2020-05-19 |
Method And Apparatus For Providing Station To Station Uniformity
App 20200071826 - LAVOIE; Adrien ; et al. | 2020-03-05 |
Recommendations for custom software upgrade by cognitive technologies
Grant 10,579,371 - Agarwal , et al. | 2020-03-03 |
Method And Apparatus For Modulating Film Uniformity
App 20200063259 - AGARWAL; Pulkit ; et al. | 2020-02-27 |
Compensating Chamber And Process Effects To Improve Critical Dimension Variation For Trim Process
App 20200043709 - Agarwal; Pulkit ; et al. | 2020-02-06 |
Method for Controlling Core Critical Dimension Variation Using Flash Trim Sequence
App 20200035572 - Agarwal; Pulkit ; et al. | 2020-01-30 |
Azimuthal Critical Dimension Non-uniformity For Double Patterning Process
App 20200002815 - AGARWAL; Pulkit ; et al. | 2020-01-02 |
Atomic layer clean for removal of photoresist patterning scum
Grant 10,494,715 - Agarwal , et al. De | 2019-12-03 |
Method Of Providing A Plasma Atomic Layer Deposition
App 20190345608 - AGARWAL; Pulkit ; et al. | 2019-11-14 |
Substrate support apparatus having reduced substrate particle generation
Grant 10,431,489 - Agarwal , et al. O | 2019-10-01 |
Methods and apparatuses for increasing reactor processing batch size
Grant 10,431,451 - Agarwal , et al. O | 2019-10-01 |
Dielectric Gapfill Of High Aspect Ratio Features Utilizing A Sacrificial Etch Cap Layer
App 20190206677 - Abel; Joseph R. ; et al. | 2019-07-04 |
Recommendations For Custom Software Upgrade By Cognitive Technologies
App 20190179633 - AGARWAL; Pulkit ; et al. | 2019-06-13 |
Software Upgrade Impact Analysis By Cognitive Services
App 20190179624 - Agarwal; Pulkit ; et al. | 2019-06-13 |
Method Of Improving Deposition Induced Cd Imbalance Using Spatially Selective Ashing Of Carbon Based Film
App 20190164757 - KARIM; Ishtak ; et al. | 2019-05-30 |
Multi Zone Pedestal For Ald Film Property Correction And Tunability
App 20190153600 - Roberts; Michael Philip ; et al. | 2019-05-23 |
Dielectric gapfill of high aspect ratio features utilizing a sacrificial etch cap layer
Grant 10,269,559 - Abel , et al. | 2019-04-23 |
Dielectric Gapfill Of High Aspect Ratio Features Utilizing A Sacrificial Etch Cap Layer
App 20190080903 - Abel; Joseph ; et al. | 2019-03-14 |
Methods And Apparatuses For Increasing Reactor Processing Batch Size
App 20180374697 - Agarwal; Pulkit ; et al. | 2018-12-27 |
Atomic Layer Clean For Removal Of Photoresist Patterning Scum
App 20180312973 - Agarwal; Pulkit ; et al. | 2018-11-01 |
Atomic Layer Etch, Reactive Precursors And Energetic Sources For Patterning Applications
App 20180308695 - LaVoie; Adrien ; et al. | 2018-10-25 |
Conical Wafer Centering And Holding Device For Semiconductor Processing
App 20180171473 - Agarwal; Pulkit ; et al. | 2018-06-21 |
Atomic layer etch methods and hardware for patterning applications
Grant 9,997,371 - Agarwal , et al. June 12, 2 | 2018-06-12 |
Methods for forming low-resistance contacts through integrated process flow systems
Grant 9,947,578 - Lei , et al. April 17, 2 | 2018-04-17 |
Cleaning of chamber components with solid carbon dioxide particles
Grant 9,925,639 - Suh , et al. March 27, 2 | 2018-03-27 |
Methods For Forming Low-resistance Contacts Through Integrated Process Flow Systems
App 20170148670 - LEI; YU ; et al. | 2017-05-25 |
Method and apparatus for performing sentiment analysis based on user reactions to displayable content
Grant 9,536,329 - Saxena , et al. January 3, 2 | 2017-01-03 |
Methods and Apparatus for Cleaning a Substrate
App 20160322239 - AGARWAL; Pulkit ; et al. | 2016-11-03 |
Substrate transfer robot end effector
Grant 9,425,076 - Agarwal , et al. August 23, 2 | 2016-08-23 |
Cleaning Of Chamber Components With Solid Carbon Dioxide Particles
App 20160016286 - Suh; Song-Moon ; et al. | 2016-01-21 |
Substrate Transfer Robot End Effector
App 20160005638 - AGARWAL; PULKIT ; et al. | 2016-01-07 |
Method And Apparatus For Performing Sentiment Analysis Based On User Reactions To Displayable Content
App 20150347903 - Saxena; Neha ; et al. | 2015-12-03 |
Substrate Support Apparatus Having Reduced Substrate Particle Generation
App 20150170954 - AGARWAL; PULKIT ; et al. | 2015-06-18 |
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