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Patent applications and USPTO patent grants for Aegerter; Brian K..The latest application filed is for "workpiece support for use in a process vessel and system for treating microelectronic workpieces".
Patent | Date |
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Methods and apparatus for rinsing and drying Grant 7,429,537 - Aegerter , et al. September 30, 2 | 2008-09-30 |
Selective treatment of microelectric workpiece surfaces Grant 7,399,713 - Aegerter , et al. July 15, 2 | 2008-07-15 |
Workpiece support for use in a process vessel and system for treating microelectronic workpieces App 20070000527 - Aegerter; Brian K. ;   et al. | 2007-01-04 |
Methods and apparatus for rinsing and drying App 20060070638 - Aegerter; Brian K. ;   et al. | 2006-04-06 |
Processes for removing residue from a workpiece App 20050233589 - Aegerter, Brian K. ;   et al. | 2005-10-20 |
Selective processing of microelectronic workpiece surfaces App 20050217707 - Aegerter, Brian K. ;   et al. | 2005-10-06 |
Selective treatment of microelectronic workpiece surfaces App 20040035448 - Aegerter, Brian K. ;   et al. | 2004-02-26 |
Selective treatment of microelectronic workpiece surfaces App 20040023494 - Aegerter, Brian K. ;   et al. | 2004-02-05 |
Selective treatment of microelectronic workpiece surfaces Grant 6,632,292 - Aegerter , et al. October 14, 2 | 2003-10-14 |
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