Patent | Date |
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Pattern Inspection Apparatus And Pattern Inspection Method App 20110229009 - ISOMURA; Ikunao ;   et al. | 2011-09-22 |
Pattern inspection apparatus, image alignment method, displacement amount estimation method, and computer-readable recording medium with program recorded thereon Grant 7,809,181 - Yamashita October 5, 2 | 2010-10-05 |
Image correction method and apparatus for use in pattern inspection system Grant 7,796,803 - Oaki September 14, 2 | 2010-09-14 |
Beam irradiation apparatus with deep ultraviolet light emission device for lithographic pattern inspection system Grant 7,781,749 - Imai August 24, 2 | 2010-08-24 |
Pattern inspection apparatus and method with enhanced test image correctability using frequency division scheme Grant 7,764,825 - Oaki July 27, 2 | 2010-07-27 |
Pattern inspection apparatus and method with local critical dimension error detectability Grant 7,756,318 - Nakatani July 13, 2 | 2010-07-13 |
Wavelength Conversion Light Source Apparatus And Wavelength Conversion Method App 20100128343 - IMAI; Shinichi ;   et al. | 2010-05-27 |
Image correcting method Grant 7,706,623 - Oaki April 27, 2 | 2010-04-27 |
Photomask Inspection Method App 20100074512 - HIRONO; Masatoshi | 2010-03-25 |
Photomask inspection apparatus comparing optical proximity correction patterns to minimum and maximum limits Grant 7,664,308 - Isomura February 16, 2 | 2010-02-16 |
Pattern inspection apparatus Grant 7,656,516 - Imai February 2, 2 | 2010-02-02 |
Target workpiece inspection apparatus, image alignment method, and computer-readable recording medium with program recorded thereon Grant 7,655,904 - Yamashita February 2, 2 | 2010-02-02 |
Workpiece inspection apparatus, workpiece inspection method and computer-readable recording medium storing program Grant 7,643,668 - Nakatani January 5, 2 | 2010-01-05 |
Die-to-database photomask defect detection using region data to modify inspection thresholds Grant 7,639,863 - Isomura December 29, 2 | 2009-12-29 |
Ultrafine Pattern Discrimination Using Transmitted/reflected Workpiece Images For Use In Lithography Inspection System App 20090304262 - HARABE; Nobuyuki | 2009-12-10 |
Die-to-die photomask defect detection using region data to modify inspection thresholds Grant 7,630,535 - Isomura December 8, 2 | 2009-12-08 |
Pattern inspection method and apparatus with high-accuracy pattern image correction capability Grant 7,627,164 - Oaki , et al. December 1, 2 | 2009-12-01 |
Pattern inspection method and apparatus using linear predictive model-based image correction technique Grant 7,627,165 - Oaki , et al. December 1, 2 | 2009-12-01 |
Mask Inspection Apparatus App 20090244530 - Iida; Susumu ;   et al. | 2009-10-01 |
Image Density-adapted Automatic Mode Switchable Pattern Correction Scheme For Workpiece Inspection App 20090245619 - Oaki; Junji ;   et al. | 2009-10-01 |
Ultrafine Lithography Pattern Inspection Using Multi-stage Tdi Image Sensors With False Image Removability App 20090238446 - Kataoka; Akira ;   et al. | 2009-09-24 |
Pattern Inspection Apparatus, Pattern Inspection Method, And Computer-readable Recording Medium Storing A Program App 20090238441 - YAMASHITA; Kyoji | 2009-09-24 |
Light Polarization Control Using Serial Combination Of Surface-segmented Half Wavelength Plates App 20090237909 - OGAWA; Riki | 2009-09-24 |
Pattern Image Correcting Apparatus, Pattern Inspection Apparatus, And Pattern Image Correcting Method App 20090214104 - SUGIHARA; Shinji | 2009-08-27 |
Sample inspection apparatus, image alignment method, and program-recorded readable recording medium Grant 7,577,288 - Yamashita August 18, 2 | 2009-08-18 |
Image density-adapted automatic mode switchable pattern correction scheme for workpiece inspection Grant 7,565,032 - Oaki , et al. July 21, 2 | 2009-07-21 |
Image correction method Grant 7,539,350 - Oaki , et al. May 26, 2 | 2009-05-26 |
Method of operating laser light source Grant 7,539,222 - Matsuki May 26, 2 | 2009-05-26 |
Beam Irradiation Apparatus With Deep Ultraviolet Light Emission Device For Lithographic Pattern Inspection System App 20090084989 - IMAI; Shinichi | 2009-04-02 |
Mask Blank For Euv Exposure And Mask For Euv Exposure App 20090075184 - HIRONO; Masatoshi | 2009-03-19 |
Pattern inspection apparatus Grant 7,495,756 - Imai February 24, 2 | 2009-02-24 |
Level detection apparatus Grant 7,495,779 - Ogawa February 24, 2 | 2009-02-24 |
Pattern inspection system using image correction scheme with object-sensitive automatic mode switchability Grant 7,487,491 - Oaki , et al. February 3, 2 | 2009-02-03 |
Wavelength Converter System, Crystal Storage Apparatus, And Crystal Replacement Method Of Wavelength Converter App 20080291528 - SUSUMU; Iida | 2008-11-27 |
Reticle Defect Inspection Apparatus And Reticle Defect Inspection Method App 20080259323 - Hirano; Ryoichi ;   et al. | 2008-10-23 |
Reticle Defect Inspection Apparatus And Inspection Method Using Thereof App 20080259328 - HIRANO; Ryoichi ;   et al. | 2008-10-23 |
Lighting Optical Apparatus And Sample Inspection Apparatus App 20080237489 - HIRONO; Masatoshi | 2008-10-02 |
Reticle Defect Inspection Apparatus And Reticle Defect Inspection Method App 20080239290 - WATANABE; Toshiyuki ;   et al. | 2008-10-02 |
Level Detection Apparatus App 20080231846 - OGAWA; Riki | 2008-09-25 |
Mask Pattern Inspection Apparatus With Koehler Illumination System Using Light Source Of High Spatial Coherency App 20080204737 - OGAWA; Riki ;   et al. | 2008-08-28 |
Light amount measurement device and light amount measurement method Grant 7,388,660 - Kobayashi , et al. June 17, 2 | 2008-06-17 |
Image Correction Method And Apparatus For Use In Pattern Inspection System App 20080050008 - Oaki; Junji | 2008-02-28 |
Pattern Inspection Apparatus And Method With Enhanced Test Image Correctability Using Frequency Division Scheme App 20080050007 - Oaki; Junji | 2008-02-28 |
Pattern Inspection Apparatus, Image Alignment Method, Displacement Amount Estimation Method, And Computer-readable Recording Medium With Program Recorded Thereon App 20080037860 - YAMASHITA; Kyoji | 2008-02-14 |
Target Workpiece Inspection Apparatus, Image Alignment Method, And Computer-readable Recording Medium With Program Recorded Thereon App 20080036899 - YAMASHITA; Kyoji | 2008-02-14 |
Pattern Inspection Apparatus App 20080013072 - IMAI; Shinichi | 2008-01-17 |
Pattern Inspection Apparatus And Method With Local Critical Dimension Error Detectability App 20070292014 - NAKATANI; Yuichi | 2007-12-20 |
Workpiece inspection apparatus assisting device, workpiece inspection method and computer-readable recording media storing program therefor Grant 7,275,006 - Tsuji , et al. September 25, 2 | 2007-09-25 |
Pattern inspection apparatus and method and workpiece tested thereby App 20070165938 - Matsumura; Kenichi ;   et al. | 2007-07-19 |
Pattern inspection apparatus and method along with workpiece tested thereby and management method of workpiece under testing App 20070146707 - Matsumura; Kenichi | 2007-06-28 |
Light amount measurement device and light amount measurement method App 20070081149 - Kobayashi; Noboru ;   et al. | 2007-04-12 |
Pattern Inspection Apparatus, Pattern Inspection Method And Program App 20070071307 - ISOMURA; Ikunao | 2007-03-29 |
Method Of Operating Laser Light Source App 20070071042 - Matsuki; Kazuto | 2007-03-29 |
Pattern inspection apparatus, pattern inspection method, and inspection sample App 20070064998 - Umeda; Takuo ;   et al. | 2007-03-22 |
Pattern inspection apparatus App 20070064223 - Imai; Shinichi | 2007-03-22 |
Workpiece inspection apparatus assisting device, workpiece inspection method and computer-readable recording media storing program therefor App 20070055467 - Tsuji; Yoshitake ;   et al. | 2007-03-08 |
Image correcting apparatus, pattern inspection apparatus, and image correcting method, and reticle App 20070053583 - Harabe; Nobuyuki | 2007-03-08 |
Reference image forming apparatus, pattern inspection apparatus, and reference image forming method, and reticle App 20070052960 - Harabe; Nobuyuki | 2007-03-08 |
Pattern inspection apparatus and method and reticle for use therein App 20070053578 - Harabe; Nobuyuki | 2007-03-08 |
Sample inspection apparatus, image alignment method, and program-recorded readable recording medium App 20070053582 - Yamashita; Kyoji | 2007-03-08 |
Pattern inspection apparatus, pattern inspection method, and program-recorded readable recording medium App 20070047798 - Isomura; Ikunao | 2007-03-01 |
Pattern inspection apparatus, pattern inspection method, and program-recorded readable recording medium App 20070047799 - Isomura; Ikunao | 2007-03-01 |
Pattern defect inspection method and apparatus using image correction technique App 20060222233 - Sugihara; Shinji ;   et al. | 2006-10-05 |
Image correcting method App 20060215899 - Oaki; Junji | 2006-09-28 |