ADRIAENS; Johannes Mathias Theodorus Antonius
Patent Applications and Registrations
Patent applications and USPTO patent grants for ADRIAENS; Johannes Mathias Theodorus Antonius.The latest application filed is for "position measurement system, interferometer system and lithographic apparatus".
- ADRIAENS; Johannes Mathias Theodorus Antonius - Eindhoven NL
| Patent | Date |
|---|---|
| Position Measurement System, Interferometer System And Lithographic Apparatus App 20200409274 - ADRIAENS; Johannes Mathias Theodorus Antonius ; et al. | 2020-12-31 |
| Substrate positioning system, lithographic apparatus and device manufacturing method Grant 9,470,988 - Van Der Pasch , et al. October 18, 2 | 2016-10-18 |
| Substrate Positioning System, Lithographic Apparatus And Device Manufacturing Method App 20150277242 - Van Der Pasch; Engelbertus Antonius Fransiscus ; et al. | 2015-10-01 |
| Calibration method for a lithographic apparatus Grant 8,330,941 - Schoormans , et al. December 11, 2 | 2012-12-11 |
| Calibration method for a lithographic apparatus Grant 7,684,011 - Schoormans , et al. March 23, 2 | 2010-03-23 |
| Lithographic apparatus and device manufacturing method Grant 7,557,903 - Schoormans , et al. July 7, 2 | 2009-07-07 |
| Calibration method for a lithographic apparatus App 20080212055 - Schoormans; Carolus Johannes Catharina ; et al. | 2008-09-04 |
| Lithographic apparatus, device manufacturing method, and computer program Grant 7,352,473 - Adriaens , et al. April 1, 2 | 2008-04-01 |
| Lithographic apparatus and a method of calibrating such an apparatus Grant 7,283,249 - Eussen , et al. October 16, 2 | 2007-10-16 |
| Lithographic apparatus and device manufacturing method App 20070132980 - Schoormans; Carolus Johannes Catharina ; et al. | 2007-06-14 |
| Method of calibration, calibration substrate, and method of device manufacture Grant 7,102,736 - Schoormans , et al. September 5, 2 | 2006-09-05 |
| Lithographic apparatus and method for determining Z position errors/variations and substrate table flatness App 20060139595 - Koenen; Willem Herman Gertruda Anna ; et al. | 2006-06-29 |
| Method of calibration, calibration substrate, and method of device manufacture App 20050286042 - Schoormans, Carolus Johannes Catharina ; et al. | 2005-12-29 |
| Lithographic apparatus, device manufacturing method, and computer program App 20050002040 - Adriaens, Johannes Mathias Theodorus Antonius ; et al. | 2005-01-06 |
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