Patent | Date |
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Substrate damage prevention system and method Grant 8,845,810 - Hwang September 30, 2 | 2014-09-30 |
Process chamber having gate slit opening and closing apparatus Grant 8,834,673 - Son September 16, 2 | 2014-09-16 |
Organic deposition apparatus and method of depositing organic substance using the same Grant 08617314 - | 2013-12-31 |
Organic deposition apparatus and method of depositing organic substance using the same Grant 8,617,314 - An , et al. December 31, 2 | 2013-12-31 |
Apparatus for attaching substrates and gap control unit thereof Grant 8,529,715 - Choi , et al. September 10, 2 | 2013-09-10 |
System and method for introducing a substrate into a process chamber Grant 8,462,008 - Lee June 11, 2 | 2013-06-11 |
System and method for introducing a substrate into a process chamber Grant 8,462,009 - Lee June 11, 2 | 2013-06-11 |
Apparatus for attaching substrates and gap control unit thereof Grant 8,388,781 - Choi , et al. March 5, 2 | 2013-03-05 |
Electrostatic chuck and apparatus having the same Grant 8,363,377 - Hwang January 29, 2 | 2013-01-29 |
Apparatus for attaching substrates of flat display panel Grant 8,256,101 - Shim September 4, 2 | 2012-09-04 |
Apparatus and method for attaching substrates Grant 8,072,573 - Hwang , et al. December 6, 2 | 2011-12-06 |
Lift pin driving device and a flat panel display manufacturing apparatus having same Grant 7,988,817 - Son August 2, 2 | 2011-08-02 |
Adhesive chuck and substrate bonding apparatus Grant 7,980,287 - Hwang July 19, 2 | 2011-07-19 |
Apparatus And Method For Attaching Substrates App 20110067805 - HWANG; Jae Seok ;   et al. | 2011-03-24 |
Substrate bonding apparatus having alignment unit and method of aligning substrates using the same Grant 7,896,046 - Park March 1, 2 | 2011-03-01 |
Apparatus and method for attaching substrates Grant 7,864,289 - Hwang , et al. January 4, 2 | 2011-01-04 |
Apparatus and method for measuring chuck attachment force Grant 7,770,478 - Son August 10, 2 | 2010-08-10 |
Apparatus for attaching substrates Grant 7,765,682 - Hwang , et al. August 3, 2 | 2010-08-03 |
System and method for introducing a substrate into a process chamber Grant 7,750,818 - Lee July 6, 2 | 2010-07-06 |
System And Method For Introducing A Substrate Into A Process Chamber App 20100148978 - LEE; In Taek | 2010-06-17 |
System And Method For Introducing A Substrate Into A Process Chamber App 20100148979 - LEE; In Taek | 2010-06-17 |
Apparatus for attaching substrates Grant 7,640,960 - Kim , et al. January 5, 2 | 2010-01-05 |
Apparatus Amd Method For Measuring Chuck Attachment Force App 20090107250 - SON; Hyoung Kyu | 2009-04-30 |
Apparatus And Method For Attaching Substrates App 20080135127 - HWANG; Jae Seok ;   et al. | 2008-06-12 |
Apparatus For Attaching Substrates And Gap Control Unit Thereof App 20080139074 - CHOI; Bong Hwan ;   et al. | 2008-06-12 |
Process Chamber Having Gate Slit Opening And Closing Apparatus App 20080110568 - SON; Hyoung Kyu | 2008-05-15 |
Substrate bonding apparatus having alignment unit and method of aligning substrates using the same App 20080047651 - Park; Si Hyun | 2008-02-28 |
Apparatus for attaching substrates of flat display panel App 20080040916 - Shim; Seok Hee | 2008-02-21 |