| Patent | Date |
|---|
Ion implantation for modification of thin film coatings on glass
Grant 11,255,013 - Bluck , et al. February 22, 2 | 2022-02-22 |
Multi-piece substrate holder and alignment mechanism
Grant 10,854,772 - Vu , et al. December 1, 2 | 2020-12-01 |
Ion implant system having grid assembly
Grant 10,636,935 - Adibi , et al. | 2020-04-28 |
System of height and alignment rollers for precise alignment of wafers for ion implantation
Grant 10,559,710 - Runstadler, Jr. , et al. Feb | 2020-02-11 |
Patterned chuck for substrate processing
Grant 10,446,430 - Bluck , et al. Oc | 2019-10-15 |
Multi-piece Substrate Holder And Alignment Mechanism
App 20190027635 - Vu; Hoang Huy ; et al. | 2019-01-24 |
System For Accurate Alignment Of Wafers For Ion Implantation
App 20190027636 - Runstadler, JR.; William Eugene ; et al. | 2019-01-24 |
Large Area Energetic Ion Source
App 20180096823 - Bluck; Terry ; et al. | 2018-04-05 |
Ion Implantation For Modification Of Thin Film Coatings On Glass
App 20180023190 - Bluck; Terry ; et al. | 2018-01-25 |
Substrate processing system and method
Grant 9,875,922 - Pederson , et al. January 23, 2 | 2018-01-23 |
Ion implantation for modification of thin film coatings on glass
Grant 9,850,570 - Bluck , et al. December 26, 2 | 2017-12-26 |
Ion Implant System Having Grid Assembly
App 20170345964 - Adibi; Babak ; et al. | 2017-11-30 |
Smudge, Scratch And Wear Resistant Glass Via Ion Implantation
App 20170242503 - Adibi; Babak ; et al. | 2017-08-24 |
Ion implant system having grid assembly
Grant 9,741,894 - Adibi , et al. August 22, 2 | 2017-08-22 |
Patterned Chuck For Substrate Processing
App 20170236740 - Bluck; Terry ; et al. | 2017-08-17 |
Grid for plasma ion implant
Grant 9,583,661 - Prabhakar , et al. February 28, 2 | 2017-02-28 |
Ion Implantation For Modification Of Thin Film Coatings On Glass
App 20170009337 - Bluck; Terry ; et al. | 2017-01-12 |
Implant masking and alignment system with rollers
Grant 9,543,114 - Adibi , et al. January 10, 2 | 2017-01-10 |
Textured Ar With Protective Thin Film
App 20160332908 - Bluck; Terry ; et al. | 2016-11-17 |
Solar Cells Having Graded Doped Regions And Methods Of Making Solar Cells Having Graded Doped Regions
App 20160322523 - Hieslmair; Henry ; et al. | 2016-11-03 |
Substrate Processing System And Method
App 20160233122 - Pederson; Terry ; et al. | 2016-08-11 |
Grid For Plasma Ion Implant
App 20160204295 - Prabhakar; Vinay ; et al. | 2016-07-14 |
Ion Implant System Having Grid Assembly
App 20160181465 - Adibi; Babak ; et al. | 2016-06-23 |
Substrate processing system and method
Grant 9,324,598 - Pederson , et al. April 26, 2 | 2016-04-26 |
Grid for plasma ion implant
Grant 9,318,332 - Prabhakar , et al. April 19, 2 | 2016-04-19 |
Ion implant system having grid assembly
Grant 9,303,314 - Adibi , et al. April 5, 2 | 2016-04-05 |
Implant Masking And Alignment
App 20160042913 - Adibi; Babak ; et al. | 2016-02-11 |
Ion implant system having grid assembly
Grant 8,997,688 - Adibi , et al. April 7, 2 | 2015-04-07 |
Ion Implant System Having Grid Assembly
App 20150072461 - Adibi; Babak ; et al. | 2015-03-12 |
Application specific implant system and method for use in solar cell fabrications
Grant 8,871,619 - Adibi , et al. October 28, 2 | 2014-10-28 |
Grid For Plasma Ion Implant
App 20140170795 - Prabhakar; Vinay ; et al. | 2014-06-19 |
Solar Cells Having Graded Doped Regions And Methods Of Making Solar Cells Having Graded Doped Regions
App 20140166087 - Hieslmair; Henry ; et al. | 2014-06-19 |
Plasma grid implant system for use in solar cell fabrications
Grant 8,749,053 - Adibi , et al. June 10, 2 | 2014-06-10 |
Solar cell fabrication with faceting and ion implantation
Grant 8,697,553 - Adibi , et al. April 15, 2 | 2014-04-15 |
Method for ion implant using grid assembly
Grant 8,697,552 - Adibi , et al. April 15, 2 | 2014-04-15 |
Substrate Processing System And Method
App 20130115764 - Pederson; Terry ; et al. | 2013-05-09 |
Ion Implant System Having Grid Assembly
App 20120125259 - Adibi; Babak ; et al. | 2012-05-24 |
Method For Ion Implant Using Grid Assembly
App 20120129325 - Adibi; Babak ; et al. | 2012-05-24 |
Direct Current Ion Implantation For Solid Phase Epitaxial Regrowth In Solar Cell Fabrication
App 20120122273 - CHUN; Moon ; et al. | 2012-05-17 |
Method and structure for thick layer transfer using a linear accelerator
Grant 8,124,499 - Henley , et al. February 28, 2 | 2012-02-28 |
Adjustable Shadow Mask Assembly For Use In Solar Cell Fabrications
App 20110192993 - Chun; Moon ; et al. | 2011-08-11 |
Advanced High Efficientcy Crystalline Solar Cell Fabrication Method
App 20110162703 - Adibi; Babak ; et al. | 2011-07-07 |
Plasma Grid Implant System For Use In Solar Cell Fabrications
App 20100323508 - Adibi; Babak ; et al. | 2010-12-23 |
Solar Cell Fabrication Using Implantation
App 20090308439 - Adibi; Babak ; et al. | 2009-12-17 |
Solar Cell Fabrication With Faceting And Ion Implantation
App 20090308450 - Adibi; Babak ; et al. | 2009-12-17 |
Application Specific Implant System And Method For Use In Solar Cell Fabrications
App 20090309039 - Adibi; Babak ; et al. | 2009-12-17 |
Formation Of Solar Cell-selective Emitter Using Implant And Anneal Method
App 20090308440 - Adibi; Babak ; et al. | 2009-12-17 |
Method And Structure For Thick Layer Transfer Using A Linear Accelerator
App 20080206962 - Henley; Francois J. ; et al. | 2008-08-28 |
Apparatus And Method For Introducing Particles Using A Radio Frequency Quadrupole Linear Accelerator For Semiconductor Materials
App 20080128641 - Henley; Francois J. ; et al. | 2008-06-05 |
Method, System And Medium For Controlling Semiconductor Wafer Processes Using Critical Dimension Measurements
App 20070288116 - Al-Bayati; Amir ; et al. | 2007-12-13 |
Method, system and medium for controlling semiconductor wafer processes using critical dimension measurements
Grant 7,225,047 - Al-Bayati , et al. May 29, 2 | 2007-05-29 |
Method for fabricating an ultra shallow junction of a field effect transistor
App 20040072446 - Liu, Wei ; et al. | 2004-04-15 |
Method, system and medium for controlling semiconductor wafer processes using critical dimension measurements
App 20030180972 - Al-Bayati, Amir ; et al. | 2003-09-25 |
Ion implantation method
Grant 6,200,883 - Taylor , et al. March 13, 2 | 2001-03-13 |
Ion implantation apparatus and a method of monitoring high energy neutral contamination in an ion implantation process
Grant 5,883,391 - Adibi , et al. March 16, 1 | 1999-03-16 |
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