| Patent | Date |
|---|
Methods And Apparatus For Measuring Edge Ring Temperature
App 20220246453 - HU; JI-DIH ; et al. | 2022-08-04 |
Methods and apparatus for integrated selective monolayer doping
Grant 11,373,871 - Colombeau , et al. June 28, 2 | 2022-06-28 |
Reflector Plate For Substrate Processing
App 20220163394 - ADERHOLD; Wolfgang R. | 2022-05-26 |
Methods and apparatus for measuring edge ring temperature
Grant 11,342,209 - Hu , et al. May 24, 2 | 2022-05-24 |
Apparatus, Systems, And Methods Of Measuring Edge Ring Distance For Thermal Processing Chambers
App 20210327732 - LUCKNER; Ole ; et al. | 2021-10-21 |
Methods And Apparatus For Measuring Edge Ring Temperature
App 20210175101 - HU; JI-DIH ; et al. | 2021-06-10 |
Thermal processing chamber with low temperature control
Grant 10,948,353 - Hawrylchak , et al. March 16, 2 | 2021-03-16 |
Methods Of Post Treating Dielectric Films With Microwave Radiation
App 20200381248 - SUN; Yong ; et al. | 2020-12-03 |
System For Non Radial Temperature Control For Rotating Substrates
App 20200373212 - ADERHOLD; Wolfgang R. ; et al. | 2020-11-26 |
System for non radial temperature control for rotating substrates
Grant 10,741,457 - Aderhold , et al. A | 2020-08-11 |
Temperature Offset And Zone Control Tuning
App 20200251362 - Kind Code | 2020-08-06 |
Methods And Apparatus For Integrated Selective Monolayer Doping
App 20200161134 - COLOMBEAU; BENJAMIN ; et al. | 2020-05-21 |
Thermal Processing Chamber With Low Temperature Control
App 20200149968 - HAWRYLCHAK; Lara ; et al. | 2020-05-14 |
Thermal cooling member with low temperature control
Grant 10,571,337 - Hawrylchak , et al. Feb | 2020-02-25 |
Optically Transparent Pedestal For Fluidly Supporting A Substrate
App 20200032386 - ADERHOLD; Wolfgang R. ; et al. | 2020-01-30 |
Pyrometer background elimination
Grant 10,330,535 - Aderhold | 2019-06-25 |
Thermal Processing Chamber With Low Temperature Control
App 20180340832 - HAWRYLCHAK; Lara ; et al. | 2018-11-29 |
Common Contact Of N++ And P++ Transistor Drain Regions In Cmos
App 20180061949 - ADERHOLD; Wolfgang R. | 2018-03-01 |
Pyrometer Background Elimination
App 20170328775 - ADERHOLD; Wolfgang R. | 2017-11-16 |
System For Non Radial Temperature Control For Rotating Substrates
App 20170309529 - ADERHOLD; Wolfgang R. ; et al. | 2017-10-26 |
Pyrometer background elimination
Grant 9,759,615 - Aderhold September 12, 2 | 2017-09-12 |
System for non radial temperature control for rotating substrates
Grant 9,728,471 - Aderhold , et al. August 8, 2 | 2017-08-08 |
Semiconductor Processing Method And Semiconductor Device
App 20170148726 - MOFFATT; Stephen ; et al. | 2017-05-25 |
Amorphization Layer, Selective, Defect Free Superactivation
App 20170084706 - ADERHOLD; Wolfgang R. | 2017-03-23 |
Common Contact Of N++ And P++ Transistor Drain Regions In Cmos
App 20160104771 - ADERHOLD; Wolfgang R. | 2016-04-14 |
Method of improving substrate uniformity during rapid thermal processing
Grant 9,245,768 - Aderhold January 26, 2 | 2016-01-26 |
Millisecond Annealing In Ammonia Ambient For Precise Placement Of Nitrogen In Thin Film Stacks
App 20150311067 - SHARMA; Shashank ; et al. | 2015-10-29 |
Flat Wafer Control
App 20150170934 - ADERHOLD; Wolfgang R. | 2015-06-18 |
Pyrometer Background Elimination
App 20150131699 - ADERHOLD; Wolfgang R. | 2015-05-14 |
Apparatus and methods for microwave processing of semiconductor substrates
Grant 9,018,110 - Stowell , et al. April 28, 2 | 2015-04-28 |
Spike anneal residence time reduction in rapid thermal processing chambers
Grant 8,939,760 - Li , et al. January 27, 2 | 2015-01-27 |
Edge ring lip
Grant 8,865,602 - Ranish , et al. October 21, 2 | 2014-10-21 |
System For Non Radial Temperature Control For Rotating Substrates
App 20140220710 - ADERHOLD; Wolfgang R. ; et al. | 2014-08-07 |
System for non radial temperature control for rotating substrates
Grant 8,724,977 - Aderhold , et al. May 13, 2 | 2014-05-13 |
Edge Ring Lip
App 20140094039 - RANISH; JOSEPH M. ; et al. | 2014-04-03 |
Apparatus And Methods For Microwave Processing Of Semiconductor Substrates
App 20140038431 - Stowell; Michael W. ; et al. | 2014-02-06 |
Spike Anneal Residence Time Reduction In Rapid Thermal Processing Chambers
App 20130206362 - Li; Jiping ; et al. | 2013-08-15 |
System For Non Radial Temperature Control For Rotating Substrates
App 20120276660 - Aderhold; Wolfgang R. ; et al. | 2012-11-01 |
System for non radial temperature control for rotating substrates
Grant 8,249,436 - Aderhold , et al. August 21, 2 | 2012-08-21 |
Semiconductor thermal process control
Grant 7,778,533 - Aderhold , et al. August 17, 2 | 2010-08-17 |
Rapid Cooling Of A Substrate By Motion
App 20100193154 - ADERHOLD; WOLFGANG R. ; et al. | 2010-08-05 |
Semiconductor thermal process control utilizing position oriented temperature generated thermal mask
Grant 7,667,162 - Aderhold , et al. February 23, 2 | 2010-02-23 |
System For Non Radial Temperature Control For Rotating Substrates
App 20090274454 - ADERHOLD; WOLFGANG R. ; et al. | 2009-11-05 |
Method And System For Deposition Tuning In An Epitaxial Film Growth Apparatus
App 20070128780 - Aderhold; Wolfgang R. ; et al. | 2007-06-07 |
Method and system for deposition tuning in an epitaxial film growth apparatus
Grant 7,195,934 - Aderhold , et al. March 27, 2 | 2007-03-27 |
Method and system for deposition tuning in an epitaxial film growth apparatus
App 20070010033 - Aderhold; Wolfgang R. ; et al. | 2007-01-11 |
Semiconductor thermal process control
App 20050254804 - Aderhold, Wolfgang R. ; et al. | 2005-11-17 |
Semiconductor thermal process control
App 20040052512 - Aderhold, Wolfgang R. ; et al. | 2004-03-18 |
Thermally processing a substrate
Grant 6,215,106 - Boas , et al. April 10, 2 | 2001-04-10 |
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