Aderhold; Wolfgang
Patent Applications and Registrations
Patent applications and USPTO patent grants for Aderhold; Wolfgang.The latest application filed is for "rtp substrate temperature one for all control algorithm".
- Aderhold; Wolfgang - Cupertino CA
- Aderhold; Wolfgang - Santa Clara CA
- Aderhold; Wolfgang - Nurnberg DE
| Patent | Date |
|---|---|
| Doping techniques Grant 11,443,948 - Aderhold , et al. September 13, 2 | 2022-09-13 |
| Rtp Substrate Temperature One For All Control Algorithm App 20220136772 - Aderhold; Wolfgang ; et al. | 2022-05-05 |
| Enhanced Process And Hardware Architecture To Detect And Correct Realtime Product Substrates App 20220122865 - Santhanam; Kartik ; et al. | 2022-04-21 |
| Doping Techniques App 20200051818 - Aderhold; Wolfgang ; et al. | 2020-02-13 |
| Apparatus and method for enhancing the cool down of radiatively heated substrates Grant 9,640,412 - Aderhold , et al. May 2, 2 | 2017-05-02 |
| Rapid thermal processing chamber with micro-positioning system Grant 9,564,349 - Sorabji , et al. February 7, 2 | 2017-02-07 |
| Backside rapid thermal processing of patterned wafers Grant 9,431,278 - Aderhold , et al. August 30, 2 | 2016-08-30 |
| Rapid thermal processing chamber with micro-positioning system Grant 9,390,950 - Sorabji , et al. July 12, 2 | 2016-07-12 |
| Rapid Thermal Processing Chamber with Micro-Positioning System App 20150050118 - Sorabji; Khurshed ; et al. | 2015-02-19 |
| Rapid thermal processing chamber with micro-positioning system Grant 8,900,889 - Sorabji , et al. December 2, 2 | 2014-12-02 |
| Backside rapid thermal processing of patterned wafers Grant 8,658,945 - Aderhold , et al. February 25, 2 | 2014-02-25 |
| Rapid Thermal Processing Chamber With Micro-positioning System App 20130043632 - Sorabji; Khurshed ; et al. | 2013-02-21 |
| Rapid Thermal Processing Chamber With Micro-positioning System App 20130043235 - Sorabji; Khurshed ; et al. | 2013-02-21 |
| Rapid thermal processing chamber with micro-positioning system Grant 8,314,371 - Sorabji , et al. November 20, 2 | 2012-11-20 |
| Temperature uniformity measurement during thermal processing Grant 8,109,669 - Aderhold , et al. February 7, 2 | 2012-02-07 |
| Rapid thermal processing chamber with shower head Grant 8,111,978 - Sorabji , et al. February 7, 2 | 2012-02-07 |
| Temperature uniformity measurements during rapid thermal processing Grant 8,104,951 - Aderhold , et al. January 31, 2 | 2012-01-31 |
| Apparatus and Method for Enhancing the Cool Down of Radiatively Heated Substrates App 20110123178 - Aderhold; Wolfgang ; et al. | 2011-05-26 |
| Rapid Thermal Processing Chamber With Micro-Positioning System App 20100133257 - Sorabji; Khurshed ; et al. | 2010-06-03 |
| Temperature Uniformity Measurement During Thermal Processing App 20100124249 - ADERHOLD; WOLFGANG ; et al. | 2010-05-20 |
| Rapid Thermal Processing Chamber With Shower Head App 20100008656 - SORABJI; KHURSHED ; et al. | 2010-01-14 |
| Backside Rapid Thermal Processing of Patterned Wafers App 20090041443 - Aderhold; Wolfgang ; et al. | 2009-02-12 |
| Backside rapid thermal processing of patterned wafers Grant 7,414,224 - Aderhold , et al. August 19, 2 | 2008-08-19 |
| Adaptive control method for rapid thermal processing of a substrate Grant 7,398,693 - Ranish , et al. July 15, 2 | 2008-07-15 |
| Ultra Shallow Junction With Rapid Thermal Anneal App 20080090393 - Aderhold; Wolfgang ; et al. | 2008-04-17 |
| Controlled Annealing Method App 20080090309 - RANISH; JOSEPH MICHAEL ; et al. | 2008-04-17 |
| Temperature Uniformity Measurements During Rapid Thermal Processing App 20080025368 - ADERHOLD; WOLFGANG ; et al. | 2008-01-31 |
| Adaptive control method for rapid thermal processing of a substrate App 20070238202 - Ranish; Joseph Michael ; et al. | 2007-10-11 |
| Transfer of wafers with edge grip App 20070215049 - Aderhold; Wolfgang ; et al. | 2007-09-20 |
| Backside rapid thermal processing of patterned wafers App 20070104470 - Aderhold; Wolfgang ; et al. | 2007-05-10 |
| Backside rapid thermal processing of patterned wafers App 20050191044 - Aderhold, Wolfgang ; et al. | 2005-09-01 |
| Thermally processing a substrate Grant 6,803,546 - Boas , et al. October 12, 2 | 2004-10-12 |
| Tuning a substrate temperature measurement system Grant 6,164,816 - Aderhold , et al. December 26, 2 | 2000-12-26 |
| Ellipsometer Grant 5,343,293 - Berger , et al. August 30, 1 | 1994-08-30 |
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