Adel; Michael E.

Patent Applications and Registrations

Patent applications and USPTO patent grants for Adel; Michael E..The latest application filed is for "method and system of database analysis and compression".

Company Profile

8.43.35

Adel; Michael E. - Ness Ziona IL
Adel; Michael E. - Zichron Ya'akov IL
Adel; Michael E. - Ya'akov IL
Adel; Michael E. - Ya'akov Zichron IL
Adel; Michael E. - Ya'akov Zickron IL
Adel; Michael E. - Zichron N/A IL
Adel; Michael E. - Zichron Yaakov IL
Adel; Michael E. - Yaakov IL
Adel; Michael E. - Zichron Yakov IL

*profile and listings may contain filings by different individuals or companies with the same name. Review application materials to confirm ownership/assignment.

Patent Activity

Patent	Date
Method And System Of Database Analysis And Compression App 20220188322 - Adel; Michael E.	2022-06-16
Determining the impacts of stochastic behavior on overlay metrology data Grant 10,901,325 - Gurevich , et al. January 26, 2	2021-01-26
Verification Metrology Targets and Their Design App 20200348604 - Adel; Michael E. ; et al.	2020-11-05
Target and process sensitivity analysis to requirements Grant 10,726,169 - Adel , et al.	2020-07-28
Verification metrology target and their design Grant 10,705,434 - Adel , et al.	2020-07-07
Process compatibility improvement by fill factor modulation Grant 10,579,768 - Levinski , et al.	2020-03-03
Overlay control with non-zero offset prediction Grant 10,409,171 - Adel , et al. Sept	2019-09-10
Determining The Impacts Of Stochastic Behavior On Overlay Metrology Data App 20190049858 - GUREVICH; Evgeni ; et al.	2019-02-14
Analyzing root causes of process variation in scatterometry metrology Grant 10,203,200 - Marciano , et al. Feb	2019-02-12
Overlay Control with Non-Zero Offset Prediction App 20180253017 - Adel; Michael E. ; et al.	2018-09-06
On-product derivation and adjustment of exposure parameters in a directed self-assembly process Grant 10,025,285 - Volkovich , et al. July 17, 2	2018-07-17
Process Compatibility Improvement by Fill Factor Modulation App 20180157784 - Levinski; Vladimir ; et al.	2018-06-07
Feed forward of metrology data in a metrology system Grant 9,903,711 - Levy , et al. February 27, 2	2018-02-27
Analyzing Root Causes of Process Variation in Scatterometry Metrology App 20180023950 - Marciano; Tal ; et al.	2018-01-25
On-device metrology Grant 9,875,946 - Shchegrov , et al. January 23, 2	2018-01-23
Verification Metrology Targets And Their Design App 20170060001 - Adel; Michael E. ; et al.	2017-03-02
Metrology Target Design For Tilted Device Designs App 20170023358 - Lee; Myungjun ; et al.	2017-01-26
Feed Forward of Metrology Data in a Metrology System App 20160290796 - Levy; Ady ; et al.	2016-10-06
Target And Process Sensitivity Analysis To Requirements App 20160042105 - Adel; Michael E. ; et al.	2016-02-11
On-product Derivation And Adjustment Of Exposure Parameters In A Directed Self-assembly Process App 20150301514 - VOLKOVICH; Roie ; et al.	2015-10-22
On-device Metrology App 20140316730 - Shchegrov; Andrei V. ; et al.	2014-10-23
Optical system Grant 8,456,641 - Levinski , et al. June 4, 2	2013-06-04
Enhanced OVL dummy field enabling "on-the-fly" OVL measurement methods Grant 8,390,808 - Levinski , et al. March 5, 2	2013-03-05
Substrate matrix to decouple tool and process effects Grant 8,142,966 - Izikson , et al. March 27, 2	2012-03-27
Substrate Matrix To Decouple Tool And Process Effects App 20110051116 - Izikson; Pavel ; et al.	2011-03-03
Apparatus and methods for detecting overlay errors using scatterometry Grant 7,876,440 - Mieher , et al. January 25, 2	2011-01-25
Apparatus and methods for determining overlay and uses of same Grant 7,876,438 - Ghinovker , et al. January 25, 2	2011-01-25
Method and system for optimizing alignment performance in a fleet of exposure tools Grant 7,679,069 - Adel , et al. March 16, 2	2010-03-16
Cross hatched metrology marks and associated method of use Grant 7,671,990 - Adel , et al. March 2, 2	2010-03-02
Apparatus and Methods for Determining Overlay and Uses of Same App 20100005442 - Ghinovker; Mark ; et al.	2010-01-07
Enhanced Ovl dummy field enabling "on-the-fly" ovl measurement methods App 20090303482 - Levinski; Vladimir ; et al.	2009-12-10
Apparatus And Methods For Detecting Overlay Errors Using Scatterometry App 20090284744 - Mieher; Walter D. ; et al.	2009-11-19
Apparatus and methods for determining overlay and uses of same Grant 7,608,468 - Ghinovker , et al. October 27, 2	2009-10-27
Feature printability optimization by optical tool Grant 7,566,517 - Adel , et al. July 28, 2	2009-07-28
Apparatus and methods for detecting overlay errors using scatterometry Grant 7,564,557 - Mieher , et al. July 21, 2	2009-07-21
Apparatus and methods for optically monitoring the fidelity of patterns produced by photolitographic tools Grant 7,557,921 - Adel , et al. July 7, 2	2009-07-07
Order selected overlay metrology Grant 7,528,941 - Kandel , et al. May 5, 2	2009-05-05
Target acquisition and overlay metrology based on two diffracted orders imaging Grant 7,528,953 - Frommer , et al. May 5, 2	2009-05-05
Methods and apparatus for designing and using micro-targets in overlay metrology Grant 7,526,749 - Levinski , et al. April 28, 2	2009-04-28
Continuously varying offset mark and methods of determining overlay Grant 7,440,105 - Adel , et al. October 21, 2	2008-10-21
Apparatus and methods for detecting overlay errors using scatterometry Grant 7,433,040 - Mieher , et al. October 7, 2	2008-10-07
Apparatus and methods for detecting overlay errors using scatterometry Grant 7,385,699 - Mieher , et al. June 10, 2	2008-06-10
Apparatus and methods for detecting overlay errors using scatterometry Grant 7,379,183 - Mieher , et al. May 27, 2	2008-05-27
System method and structure for determining focus accuracy Grant 7,352,451 - Levinski , et al. April 1, 2	2008-04-01
Method And System For Optimizing Alignment Performance In A Fleet Of Exposure Tools App 20080073589 - Adel; Michael E. ; et al.	2008-03-27
Apparatus and methods for providing in-chip microtargets for metrology or inspection Grant 7,346,878 - Cohen , et al. March 18, 2	2008-03-18
Apparatus And Methods For Detecting Overlay Errors Using Scatterometry App 20080049226 - Mieher; Walter D. ; et al.	2008-02-28
Apparatus And Methods For Detecting Overlay Errors Using Scatterometry App 20080024766 - Mieher; Walter D. ; et al.	2008-01-31
Use of overlay diagnostics for enhanced automatic process control Grant 7,310,789 - Seligson , et al. December 18, 2	2007-12-18
Order Selected Overlay Metrology App 20070279630 - Kandel; Daniel ; et al.	2007-12-06
Apparatus and methods for detecting overlay errors using scatterometry Grant 7,301,634 - Mieher , et al. November 27, 2	2007-11-27
Apparatus and methods for detecting overlay errors using scatterometry Grant 7,298,481 - Mieher , et al. November 20, 2	2007-11-20
Apparatus and methods for detecting overlay errors using scatterometry Grant 7,289,213 - Mieher , et al. October 30, 2	2007-10-30
Apparatus and methods for detecting overlay errors using scatterometry Grant 7,280,212 - Mieher , et al. October 9, 2	2007-10-09
Apparatus and methods for detecting overlay errors using scatterometry Grant 7,242,477 - Mieher , et al. July 10, 2	2007-07-10
Methods and apparatus for designing and using micro-targets in overlay metrology App 20070096094 - Levinski; Vladimir ; et al.	2007-05-03
Use of overlay diagnostics for enhanced automatic process control App 20060280357 - Seligson; Joel L. ; et al.	2006-12-14
Use of overlay diagnostics for enhanced automatic process control Grant 7,111,256 - Seligson , et al. September 19, 2	2006-09-19
Diffraction order controlled overlay metrology App 20060197951 - Frommer; Aviv ; et al.	2006-09-07
System method and structure for determining focus accuracy App 20060103836 - Levinski; Vladimir ; et al.	2006-05-18
Continuously varying offset mark and methods of determining overlay App 20050195398 - Adel, Michael E. ; et al.	2005-09-08
Use of overlay diagnostics for enhanced automatic process control Grant 6,928,628 - Seligson , et al. August 9, 2	2005-08-09
Apparatus and methods for detecting overlay errors using scatterometry App 20040257571 - Mieher, Walter D. ; et al.	2004-12-23
Apparatus and methods for detecting overlay errors using scatterometry App 20040233441 - Mieher, Walter D. ; et al.	2004-11-25
Apparatus and methods for detecting overlay errors using scatterometry App 20040233443 - Mieher, Walter D. ; et al.	2004-11-25
Apparatus and methods for detecting overlay errors using scatterometry App 20040233440 - Mieher, Walter D. ; et al.	2004-11-25
Apparatus and methods for detecting overlay errors using scatterometry App 20040233439 - Mieher, Walter D. ; et al.	2004-11-25
Apparatus and methods for detecting overlay errors using scatterometry App 20040233444 - Mieher, Walter D. ; et al.	2004-11-25
Apparatus and methods for detecting overlay errors using scatterometry App 20040233442 - Mieher, Walter D. ; et al.	2004-11-25
Use of overlay diagnostics for enhanced automatic process control App 20040040003 - Seligson, Joel L. ; et al.	2004-02-26
Use of overlay diagnostics for enhanced automatic process control App 20040038455 - Seligson, Joel L. ; et al.	2004-02-26
Spectral imaging using illumination of preselected spectral content Grant 6,142,629 - Adel , et al. November 7, 2	2000-11-07
Temperature measuring method and apparatus Grant 6,082,892 - Adel , et al. July 4, 2	2000-07-04
Film thickness mapping using interferometric spectral imaging Grant 5,856,871 - Cabib , et al. January 5, 1	1999-01-05
Multipoint temperature monitoring apparatus for semiconductor wafers during processing Grant 5,823,681 - Cabib , et al. October 20, 1	1998-10-20