Patent | Date |
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Measurement technique for refractive index inhomogeneity between plates of a lightguide optical element (LOE) Grant 11,454,590 - Gelberg , et al. September 27, 2 | 2022-09-27 |
Measurement Technique for Refractive Index Inhomogeneity Between Plates of a Lightguide Optical Element (LOE) App 20210116367 - GELBERG; Jonathan ;   et al. | 2021-04-22 |
Overlay targets with orthogonal underlayer dummyfill Grant 10,890,436 - Amir , et al. January 12, 2 | 2021-01-12 |
Recipe optimization based zonal analysis Grant 10,763,146 - Volkovich , et al. Sep | 2020-09-01 |
Apparatus and methods for detecting overlay errors using scatterometry Grant 10,451,412 - Adel , et al. Oc | 2019-10-22 |
Metrology target identification, design and verification Grant 10,387,608 - Adel , et al. A | 2019-08-20 |
In-line heated solar thermal storage collector Grant 10,253,991 - Klier , et al. | 2019-04-09 |
Recipe Optimization Based Zonal Analysis App 20190088514 - VOLKOVICH; Roie ;   et al. | 2019-03-21 |
Solar thermal collecting system Grant 10,036,575 - Klier , et al. July 31, 2 | 2018-07-31 |
Metrology target identification, design and verification Grant 9,910,953 - Adel , et al. March 6, 2 | 2018-03-06 |
Metrology Target Identification, Design And Verification App 20180032662 - Adel; Michael ;   et al. | 2018-02-01 |
Apparatus And Methods For Detecting Overlay Errors Using Scatterometry App 20170336198 - Adel; Michael ;   et al. | 2017-11-23 |
Apparatus for measuring overlay errors Grant 9,702,693 - Ghinovker , et al. July 11, 2 | 2017-07-11 |
Method and system for universal target based inspection and metrology Grant 9,576,861 - Park , et al. February 21, 2 | 2017-02-21 |
Metrology through use of feed forward feed sideways and measurement cell re-use Grant 9,559,019 - Adel , et al. January 31, 2 | 2017-01-31 |
Material handling with dedicated automated material handling system Grant 9,558,978 - Widmann , et al. January 31, 2 | 2017-01-31 |
Apparatus For Measuring Overlay Errors App 20160313116 - Ghinovker; Mark ;   et al. | 2016-10-27 |
Metrology Target Indentification, Design And Verification App 20160196379 - Adel; Michael ;   et al. | 2016-07-07 |
Apparatus and methods for detecting overlay errors using scatterometry Grant 9,347,879 - Adel , et al. May 24, 2 | 2016-05-24 |
System and method for temperature limiting in a sealed solar energy collector Grant 9,335,068 - Klier , et al. May 10, 2 | 2016-05-10 |
Apparatus And Methods For Detecting Overlay Errors Using Scatterometry App 20160047744 - Adel; Michael ;   et al. | 2016-02-18 |
In-line heated solar thermal storage collector App 20160047556 - KLIER; Shimon ;   et al. | 2016-02-18 |
Rule checking for metrology and inspection Grant 9,151,712 - Adel , et al. October 6, 2 | 2015-10-06 |
Feedforward/feedback litho process control of stress and overlay Grant 9,116,442 - Adel , et al. August 25, 2 | 2015-08-25 |
Metrology Through Use Of Feed Forward Feed Sideways And Measurement Cell Re-use App 20150112624 - Adel; Michael ;   et al. | 2015-04-23 |
System And Method For Temperature Limiting In A Sealed Solar Energy Collector App 20150075517 - KLIER; Shimon ;   et al. | 2015-03-19 |
Metrology through use of feed forward feed sideways and measurement cell re-use Grant 8,930,156 - Adel , et al. January 6, 2 | 2015-01-06 |
Flexible scatterometry metrology system and method Grant 8,908,175 - Kandel , et al. December 9, 2 | 2014-12-09 |
System and method for temperature limiting in a sealed solar energy collector Grant 8,857,426 - Klier , et al. October 14, 2 | 2014-10-14 |
Method and System for Universal Target Based Inspection and Metrology App 20140199791 - Park; Allen ;   et al. | 2014-07-17 |
Method of removal of snow or ice coverage from solar collectors App 20140166044 - Klier; Zvika ;   et al. | 2014-06-19 |
Efficient Material Handling In Semiconductor Wafer Processing App 20130294871 - WIDMANN; AMIR ;   et al. | 2013-11-07 |
Overlay Targets with Orthogonal Underlayer Dummyfill App 20130293890 - Amir; Nuriel ;   et al. | 2013-11-07 |
Overlay marks, methods of overlay mark design and methods of overlay measurements Grant 8,330,281 - Ghinovker , et al. December 11, 2 | 2012-12-11 |
System And Method For Temperature Limiting In A Sealed Solar Energy Collector App 20120291770 - Klier; Shimon ;   et al. | 2012-11-22 |
Enhanced OVL dummy field enabling "on-the-fly" OVL measurement methods Grant 8,243,273 - Levinski , et al. August 14, 2 | 2012-08-14 |
Scatterometry metrology target design optimization Grant 8,214,771 - Adel , et al. July 3, 2 | 2012-07-03 |
Feedforward/feedback Litho Process Control Of Stress And Overlay App 20120094400 - Adel; Michael ;   et al. | 2012-04-19 |
Feedforward/feedback litho process control of stress and overlay Grant 8,111,376 - Adel , et al. February 7, 2 | 2012-02-07 |
Solar Thermal Collecting System App 20110265785 - Klier; Shimon ;   et al. | 2011-11-03 |
Method And System For Allocating Solar Radiation Between Multiple Applications App 20110174294 - ADEL; Michael ;   et al. | 2011-07-21 |
Apparatus and methods for detecting overlay errors using scatterometry Grant 7,933,016 - Mieher , et al. April 26, 2 | 2011-04-26 |
Overlay marks and methods of manufacturing such marks Grant 7,879,627 - Ghinovker , et al. February 1, 2 | 2011-02-01 |
Overlay metrology and control method Grant 7,804,994 - Adel , et al. September 28, 2 | 2010-09-28 |
Scatterometry Metrology Target Design Optimization App 20100175033 - Adel; Michael ;   et al. | 2010-07-08 |
Apparatus And Methods For Detecting Overlay Errors Using Scatterometry App 20100091284 - Mieher; Walter D. ;   et al. | 2010-04-15 |
Overlay metrology using the near infra-red spectral range Grant 7,684,039 - Adel , et al. March 23, 2 | 2010-03-23 |
Apparatus and methods for detecting overlay errors using scatterometry Grant 7,663,753 - Mieher , et al. February 16, 2 | 2010-02-16 |
Metrology Through Use Of Feed Forward Feed Sideways And Measurement Cell Re-use App 20100017005 - Adel; Michael ;   et al. | 2010-01-21 |
Overlay Marks, Methods Of Overlay Mark Design And Methods Of Overlay Measurements App 20090291513 - Ghinovker; Mark ;   et al. | 2009-11-26 |
Optical gain approach for enhancement of overlay and alignment systems performance Grant 7,602,491 - Kandel , et al. October 13, 2 | 2009-10-13 |
Method for generating a design rule map having spatially varying overlay budget Grant 7,571,422 - Adel , et al. August 4, 2 | 2009-08-04 |
Feedforward/feedback Litho Process Control Of Stress And Overlay App 20080316442 - Adel; Michael ;   et al. | 2008-12-25 |
Optical Gain Approach For Enhancement Of Overlay And Alignment Systems Performance App 20080266561 - Kandel; Daniel ;   et al. | 2008-10-30 |
Measuring phase errors on phase shift masks Grant 7,368,208 - Adel , et al. May 6, 2 | 2008-05-06 |
Apparatus And Methods For Detecting Overlay Errors Using Scatterometry App 20080094630 - Mieher; Walter D. ;   et al. | 2008-04-24 |
Overlay marks, methods of overlay mark design and methods of overlay measurements Grant 7,355,291 - Adel , et al. April 8, 2 | 2008-04-08 |
Method For Generating A Design Rule Map Having Spatially Varying Overlay Budget App 20080077894 - Adel; Michael ;   et al. | 2008-03-27 |
Overlay Marks, Methods Of Overlay Mark Design And Methods Of Overlay Measurements App 20080023855 - Ghinovker; Mark ;   et al. | 2008-01-31 |
Overlay marks, methods of overlay mark design and methods of overlay measurements Grant 7,317,824 - Ghinovker , et al. January 8, 2 | 2008-01-08 |
Apparatus and methods for detecting overlay errors using scatterometry Grant 7,317,531 - Mieher , et al. January 8, 2 | 2008-01-08 |
Overlay marks, methods of overlay mark design and methods of overlay measurements Grant 7,274,814 - Ghinovker , et al. September 25, 2 | 2007-09-25 |
Overlay Metrology Using The Near Infra-red Spectral Range App 20070187606 - Adel; Michael ;   et al. | 2007-08-16 |
Overlay marks, methods of overlay mark design and methods of overlay measurements Grant 7,181,057 - Adel , et al. February 20, 2 | 2007-02-20 |
Overlay marks, methods of overlay mark design and methods of overlay measurements Grant 7,177,457 - Adel , et al. February 13, 2 | 2007-02-13 |
Overlay marks, methods of overlay mark design and methods of overlay measurements App 20060204073 - Ghinovker; Mark ;   et al. | 2006-09-14 |
Overlay marks, methods of overlay mark design and methods of overlay measurements App 20060177120 - Ghinovker; Mark ;   et al. | 2006-08-10 |
Method and mark for metrology of phase errors on phase shift masks Grant 7,075,639 - Adel , et al. July 11, 2 | 2006-07-11 |
Overlay marks, methods of overlay mark design and methods of overlay measurements Grant 7,068,833 - Ghinovker , et al. June 27, 2 | 2006-06-27 |
Overlay marks, methods of overlay mark design and methods of overlay measurements App 20060039595 - Adel; Michael ;   et al. | 2006-02-23 |
Overlay marks, methods of overlay mark design and methods of overlay measurements Grant 6,985,618 - Adel , et al. January 10, 2 | 2006-01-10 |
Overlay marks, methods of overlay mark design and methods of overlay measurements Grant 6,921,916 - Adel , et al. July 26, 2 | 2005-07-26 |
Method and mark for metrology of phase errors on phase shift masks App 20040212796 - Adel, Michael ;   et al. | 2004-10-28 |
Apparatus and method for detecting overlay errors using scatterometry App 20040169861 - Mieher, Walter D. ;   et al. | 2004-09-02 |
Overlay metrology and control method App 20030223630 - Adel, Michael ;   et al. | 2003-12-04 |
Spectral bio-imaging of the eye Grant 6,556,853 - Cabib , et al. April 29, 2 | 2003-04-29 |
Overlay marks, methods of overlay mark design and methods of overlay measurements App 20030026471 - Adel, Michael ;   et al. | 2003-02-06 |
Overlay marks, methods of overlay mark design and methods of overlay measurements App 20030021466 - Adel, Michael ;   et al. | 2003-01-30 |
Overlay marks, methods of overlay mark design and methods of overlay measurements App 20030021467 - Adel, Michael ;   et al. | 2003-01-30 |
Overlay marks, methods of overlay mark design and methods of overlay measurements App 20030021465 - Adel, Michael ;   et al. | 2003-01-30 |
Spectral bio-imaging of the eye Grant 6,419,361 - Cabib , et al. July 16, 2 | 2002-07-16 |
Spectral bio-imaging of the eye App 20010033364 - Cabib, Dario ;   et al. | 2001-10-25 |
Spectral bio-imaging of the eye Grant 6,198,532 - Cabib , et al. March 6, 2 | 2001-03-06 |