Adams; Bruce E.

Patent Applications and Registrations

Patent applications and USPTO patent grants for Adams; Bruce E..The latest application filed is for "atomic oxygen detection in semiconductor processing chambers".

Company Profile

8.71.70

Adams; Bruce E. - Portland OR
ADAMS; Bruce E. - Lancaster PA
Adams, Bruce E. - Landisville PA

*profile and listings may contain filings by different individuals or companies with the same name. Review application materials to confirm ownership/assignment.

Patent Activity

Patent	Date
Atomic Oxygen Detection In Semiconductor Processing Chambers App 20220093428 - Adams; Bruce E. ; et al.	2022-03-24
Temperature measurement using etalons Grant 11,280,686 - Howells , et al. March 22, 2	2022-03-22
Annealing Apparatus Using Two Wavelengths Of Radiation App 20210053147 - JENNINGS; Dean ; et al.	2021-02-25
Sag-resistant Acoustic Board App 20210002890 - KRICK; Charles G. ; et al.	2021-01-07
Annealing apparatus using two wavelengths of radiation Grant 10,857,623 - Jennings , et al. December 8, 2	2020-12-08
Temperature Measurement Using Etalons App 20200025631 - HOWELLS; Samuel C. ; et al.	2020-01-23
Overlay error correction Grant 10,234,772 - Bangar , et al.	2019-03-19
Thermal processing apparatus Grant 10,181,409 - Moffatt , et al. Ja	2019-01-15
Pyrometry filter for thermal process chamber Grant 10,147,623 - Ranish , et al. De	2018-12-04
Methods for crystallizing a substrate using a plurality of laser pulses and freeze periods Grant 10,074,538 - Adams , et al. September 11, 2	2018-09-11
Dynamic optical valve for mitigating non-uniform heating in laser processing Grant 9,958,709 - Adams May 1, 2	2018-05-01
Process sheet resistance uniformity improvement using multiple melt laser exposures Grant 9,953,851 - Li , et al. April 24, 2	2018-04-24
Overlay Error Correction App 20180101103 - BANGAR; Mangesh ; et al.	2018-04-12
Annealing Apparatus Using Two Wavelengths Of Radiation App 20180099353 - JENNINGS; Dean ; et al.	2018-04-12
Multiple beam combiner for laser processing apparatus Grant 9,927,622 - Moffatt , et al. March 27, 2	2018-03-27
Apparatus and method of improving beam shaping and beam homogenization Grant 9,908,200 - Adams , et al. March 6, 2	2018-03-06
Overlay error correction Grant 9,864,280 - Bangar , et al. January 9, 2	2018-01-09
Annealing apparatus using two wavelengths of radiation Grant 9,839,976 - Jennings , et al. December 12, 2	2017-12-12
Pyrometry Filter For Thermal Process Chamber App 20170330776 - RANISH; Joseph M. ; et al.	2017-11-16
Pyrometry filter for thermal process chamber Grant 9,786,529 - Ranish , et al. October 10, 2	2017-10-10
Semiconductor Processing Method And Semiconductor Device App 20170148726 - MOFFATT; Stephen ; et al.	2017-05-25
Overlay Error Correction App 20170097576 - Bangar; Mangesh ; et al.	2017-04-06
Particle control in laser processing systems Grant 9,579,750 - Hunter , et al. February 28, 2	2017-02-28
Process Sheet Resistance Uniformity Improvement Using Multiple Melt Laser Exposures App 20170040194 - LI; Jiping ; et al.	2017-02-09
Crystallization Methods App 20160293414 - ADAMS; Bruce E. ; et al.	2016-10-06
Magnetic Field Guided Crystal Orientation System For Metal Conductivity Enhancement App 20160208415 - Bencher; Christopher Dennis ; et al.	2016-07-21
Process sheet resistance uniformity improvement using multiple melt laser exposures Grant 9,390,926 - Li , et al. July 12, 2	2016-07-12
Methods for crystallizing a substrate using energy pulses and freeze periods Grant 9,373,511 - Adams , et al. June 21, 2	2016-06-21
Multiple Beam Combiner For Laser Processing Apparatus App 20160139417 - Moffatt; Stephen ; et al.	2016-05-19
Multiple beam combiner for laser processing apparatus Grant 9,285,595 - Moffatt , et al. March 15, 2	2016-03-15
Scanned Pulse Anneal Apparatus And Methods App 20160020117 - HUNTER; Aaron Muir ; et al.	2016-01-21
Diffractive Optical Elements And Methods For Patterning Thin Film Electrochemical Devices App 20150293371 - Song; Daoying ; et al.	2015-10-15
Apparatus for speckle reduction, pulse stretching, and beam homogenization Grant 9,146,337 - Li , et al. September 29, 2	2015-09-29
Multiple Beam Combiner For Laser Processing Apparatus App 20150124329 - MOFFATT; Stephen ; et al.	2015-05-07
Annealing Apparatus Using Two Wavelengths Of Radiation App 20150069028 - JENNINGS; Dean ; et al.	2015-03-12
Multiple beam combiner for laser processing apparatus Grant 8,970,963 - Moffatt , et al. March 3, 2	2015-03-03
Apparatus And Method Of Improving Beam Shaping And Beam Homogenization App 20150053658 - ADAMS; Bruce E. ; et al.	2015-02-26
Dynamic Optical Valve For Mitigating Non-uniform Heating In Laser Processing App 20150048062 - ADAMS; Bruce E.	2015-02-19
Pyrometry Filter For Thermal Process Chamber App 20140255862 - RANISH; Joseph M. ; et al.	2014-09-11
Process Sheet Resistance Uniformity Improvement Using Multiple Melt Laser Exposures App 20140256161 - LI; Jiping ; et al.	2014-09-11
Apparatus For Speckle Reduction, Pulse Stretching, And Beam Homogenization App 20140254022 - LI; Jiping ; et al.	2014-09-11
Apparatus and method of improving beam shaping and beam homogenization Grant 8,829,392 - Adams , et al. September 9, 2	2014-09-09
Defect-free junction formation using octadecaborane self-amorphizing implants Grant 8,815,719 - Li , et al. August 26, 2	2014-08-26
Aperture control of thermal processing radiation Grant 8,785,815 - Sade , et al. July 22, 2	2014-07-22
Annealing apparatus using two wavelengths of continuous wave laser radiation Grant 8,765,618 - Jennings , et al. July 1, 2	2014-07-01
Thermal Treatment Methods And Apparatus App 20140148017 - ADAMS; Bruce E. ; et al.	2014-05-29
Novel Thermal Processing Apparatus App 20140138362 - MOFFATT; Stephen ; et al.	2014-05-22
Method and apparatus for decorrelation of spatially and temporally coherent light Grant 8,693,095 - Jennings , et al. April 8, 2	2014-04-08
Method For Partitioning And Incoherently Summing A Coherent Beam App 20140009829 - JENNINGS; Dean ; et al.	2014-01-09
Aperture Control Of Thermal Preocessing Radiation App 20130340495 - Sade; Amikam ; et al.	2013-12-26
Rapid detection of imminent failure in optical thermal processing of a substrate Grant 8,586,893 - Adams , et al. November 19, 2	2013-11-19
Thermal processing apparatus Grant 8,569,187 - Moffatt , et al. October 29, 2	2013-10-29
Photovoltaic cells including peaks and methods of manufacture Grant 8,541,680 - Eberspacher , et al. September 24, 2	2013-09-24
Multiple Beam Combiner For Laser Processing Apparatus App 20130163091 - MOFFATT; STEPHEN ; et al.	2013-06-27
Methods and apparatus for aligning a substrate in a process chamber Grant 8,461,022 - Koelmel , et al. June 11, 2	2013-06-11
Method And Apparatus For Decorrelation Of Spatially And Temporally Coherent Light App 20130141788 - JENNINGS; Dean ; et al.	2013-06-06
Multi-stage optical homogenization Grant 8,432,613 - Jennings , et al. April 30, 2	2013-04-30
Particle Control In Laser Processing Systems App 20130087547 - Hunter; Aaron Muir ; et al.	2013-04-11
Crystallization Methods App 20130055731 - Adams; Bruce E. ; et al.	2013-03-07
Apparatus including heating source reflective filter for pyrometry Grant 8,367,983 - Ranish , et al. February 5, 2	2013-02-05
Method and apparatus for decorrelation of spatially and temporally coherent light Grant 8,363,320 - Jennings , et al. January 29, 2	2013-01-29
Novel Thermal Processing Apparatus App 20120329178 - Moffatt; Stephen ; et al.	2012-12-27
Novel Thermal Processing Apparatus App 20120325784 - Moffatt; Stephen ; et al.	2012-12-27
Photovoltaic cells including spaced ramps and methods of manufacture Grant 8,330,040 - Adams December 11, 2	2012-12-11
Methods of solid phase recrystallization of thin film using pulse train annealing method Grant 8,247,317 - Moffatt , et al. August 21, 2	2012-08-21
Pyrometer for laser annealing system Grant 8,232,503 - Li , et al. July 31, 2	2012-07-31
Defect-free Junction Formation Using Octadecaborane Self-amorphizing Implants App 20120190182 - LI; JIPING ; et al.	2012-07-26
Defect-free Junction Formation Using Octadecaborane Self-amorphizing Implants App 20120171853 - Li; Jiping ; et al.	2012-07-05
Apparatus And Method Of Improving Beam Shaping And Beam Homogenization App 20120148701 - Adams; Bruce E. ; et al.	2012-06-14
Pyrometry for substrate processing Grant 8,147,137 - Patalay , et al. April 3, 2	2012-04-03
Apparatus and method of improving beam shaping and beam homogenization Grant 8,148,663 - Adams , et al. April 3, 2	2012-04-03
Method And Apparatus For Decorrelation Of Spatially And Temporally Coherent Light App 20110199683 - Jennings; Dean ; et al.	2011-08-18
Temperature Measurement And Control Of Wafer Support In Thermal Processing Chamber App 20110089166 - HUNTER; AARON MUIR ; et al.	2011-04-21
Defect-free Junction Formation Using Octadecaborane Self-amorphizing Implants App 20110070724 - Li; Jiping ; et al.	2011-03-24
Methods Of Solid Phase Recrystallization Of Thin Film Using Pulse Train Annealing Method App 20110065264 - MOFFATT; STEPHEN ; et al.	2011-03-17
Compensation techniques for substrate heating processes Grant 7,906,402 - Ranish , et al. March 15, 2	2011-03-15
Photovoltaic Cells Including Peaks And Methods Of Manufacture App 20110023957 - Eberspacher; Chris ; et al.	2011-02-03
Pyrometer For Laser Annealing System Compatible With Amorphous Carbon Optical Absorber Layer App 20110006044 - Li; Jiping ; et al.	2011-01-13
Absorber layer candidates and techniques for application Grant 7,867,868 - Ranish , et al. January 11, 2	2011-01-11
Temperature measurement and control of wafer support in thermal processing chamber Grant 7,860,379 - Hunter , et al. December 28, 2	2010-12-28
Methods And Apparatus For Aligning A Substrate In A Process Chamber App 20100264132 - KOELMEL; BLAKE R. ; et al.	2010-10-21
Multi-stage Optical Homogenization App 20100266268 - Jennings; Dean C. ; et al.	2010-10-21
Pryometer for laser annealing system compatible with amorphous carbon optical absorber layer Grant 7,804,042 - Li , et al. September 28, 2	2010-09-28
High speed phase scrambling of a coherent beam using plasma Grant 7,795,816 - Jennings , et al. September 14, 2	2010-09-14
Photovoltaic Cells Including Spaced Ramps and Methods of Manufacture App 20100193020 - Adams; Bruce E.	2010-08-05
Pyrometry For Substrate Processing App 20100124248 - PATALAY; KAILASH KIRAN ; et al.	2010-05-20
Multiple band pass filtering for pyrometry in laser based annealing systems Grant 7,717,617 - Adams , et al. May 18, 2	2010-05-18
Compensation Techniques For Substrate Heating Processes App 20100023154 - RANISH; JOSEPH M. ; et al.	2010-01-28
Apparatus Including Heating Source Reflective Filter for Pyrometry App 20090289053 - Ranish; Joseph M. ; et al.	2009-11-26
Compensation techniques for substrate heating processes Grant 7,598,150 - Ranish , et al. October 6, 2	2009-10-06
High Speed Phase Scrambling Of A Coherent Beam Using Plasma App 20090091817 - Jennings; Dean ; et al.	2009-04-09
Multiple band pass filtering for pyrometry in laser based annealing systems App 20090084986 - Adams; Bruce E. ; et al.	2009-04-02
Dynamic surface annealing using addressable laser array with pyrometry feedback Grant 7,494,272 - Thomas , et al. February 24, 2	2009-02-24
Increased Nanosecond Laser Pulse-to-pulse Energy Repeatability Using Active Laser Pulse Energy Control App 20090046750 - LI; JIPING ; et al.	2009-02-19
Method For Partitioning And Incoherently Summing A Coherent Beam App 20090034071 - JENNINGS; DEAN ; et al.	2009-02-05
Method And Apparatus For Decorrelation Of Spatially And Temporally Coherent Light App 20090034072 - Jennings; Dean ; et al.	2009-02-05
Apparatus and method of improving beam shaping and beam homogenization App 20090032511 - Adams; Bruce E. ; et al.	2009-02-05
Pyrometer For Laser Annealing System Compatible With Amorphous Carbon Optical Absorber Layer App 20080308534 - Li; Jiping ; et al.	2008-12-18
Multiple band pass filtering for pyrometry in laser based annealing systems Grant 7,438,468 - Adams , et al. October 21, 2	2008-10-21
Rapid detection of imminent failure in optical thermal processing of a substrate App 20080217306 - Adams; Bruce E. ; et al.	2008-09-11
Rapid detection of imminent failure in laser thermal processing of a substrate Grant 7,422,988 - Adams , et al. September 9, 2	2008-09-09
Absorber Layer Candidates And Techniques For Application App 20080214014 - RANISH; JOSEPH M. ; et al.	2008-09-04
Temperature Measurement And Control Of Wafer Support In Thermal Processing Chamber App 20080170842 - HUNTER; AARON MUIR ; et al.	2008-07-17
Method And Apparatus For Heating A Substrate App 20080142208 - RANISH; JOSEPH M. ; et al.	2008-06-19
Method And Apparatus For Heating A Substrate App 20080145038 - RANISH; JOSEPH M. ; et al.	2008-06-19
Dynamic Surface Annealing Using Addressable Laser Array With Pyrometry Feedback App 20080121626 - Thomas; Timothy N. ; et al.	2008-05-29
Compensation Techniques For Substrate Heating Processes App 20080118641 - Ranish; Joseph M. ; et al.	2008-05-22
Thermal flux laser annealing for ion implantation of semiconductor P-N junctions Grant 7,135,392 - Adams , et al. November 14, 2	2006-11-14
Single axis light pipe for homogenizing slow axis of illumination systems based on laser diodes Grant 7,129,440 - Adams , et al. October 31, 2	2006-10-31
Single axis light pipe for homogenizing slow axis of illumination systems bases on laser diodes App 20060102605 - Adams; Bruce E. ; et al.	2006-05-18
Multiple band pass filtering for pyrometry in laser based annealing systems App 20060102607 - Adams; Bruce E. ; et al.	2006-05-18
Rapid detection of imminent failure in laser thermal processing of a substrate App 20060102599 - Adams; Bruce E. ; et al.	2006-05-18
Use of pet film as a barrier to bottom-up staining App 20020150779 - Ward, Harry D. ; et al.	2002-10-17
Non-contact optical techniques for measuring surface conditions Grant 5,769,540 - Schietinger , et al. June 23, 1	1998-06-23
Non-contact optical techniques for measuring surface conditions Grant 5,490,728 - Schietinger , et al. * February 13, 1	1996-02-13
Non-contact techniques for measuring temperature of radiation-heated objects Grant 5,318,362 - Schietinger , et al. June 7, 1	1994-06-07
Non-contact optical techniques for measuring surface conditions Grant 5,310,260 - Schietinger , et al. May 10, 1	1994-05-10
Temperature measurement with combined photo-luminescent and black body sensing techniques Grant 5,183,338 - Wickersheim , et al. February 2, 1	1993-02-02
Techniques for measuring the thickness of a film formed on a substrate Grant 5,166,080 - Schietinger , et al. November 24, 1	1992-11-24
Non-contact techniques for measuring temperature or radiation-heated objects Grant 5,154,512 - Schietinger , et al. October 13, 1	1992-10-13
Temperature measurement with combined photo-luminescent and black body sensing techniques Grant 5,112,137 - Wickersheim , et al. May 12, 1	1992-05-12
Heat resistant curable surface coating composition comprising the reaction product of an unsaturated polyaryloxyphosphazene and an unsaturated aryloxycyclotriphosphazene Grant 4,145,479 - Adams , et al. March 20, 1	1979-03-20

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