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Method for designing gratings Grant 7,800,824 - Wang , et al. September 21, 2 | 2010-09-21 |
Method for measuring dimensions and optical system using the same Grant 7,619,753 - Liu , et al. November 17, 2 | 2009-11-17 |
Method for correlating a structural parameter of a plurality of gratings and method for determining a structural parameter value of an unknown grating using the same Grant 7,433,060 - Liu , et al. October 7, 2 | 2008-10-07 |
Method for inspecting a grating biochip Grant 7,355,713 - Shyu , et al. April 8, 2 | 2008-04-08 |
Line Profile Asymmetry Measurement App 20070201043 - Raymond; Christopher | 2007-08-30 |
Apparatuses and methods for analyzing semiconductor workpieces App 20070176119 - Hummel; Steve | 2007-08-02 |
Apparatus and method for non-contact assessment of a constituent in semiconductor substrates App 20070048948 - Vagos; Pedro | 2007-03-01 |
Apparatuses and methods for detecting defects in semiconductor workpieces App 20070000434 - Buczkowski; Andrzej | 2007-01-04 |
Apparatus and method for enhanced critical dimension scatterometry App 20060289789 - Raymond; Chris ;   et al. | 2006-12-28 |
Apparatus and method for enhanced critical dimension scatterometry App 20060289790 - Raymond; Chris ;   et al. | 2006-12-28 |
Apparatus and method for enhanced critical dimension scatterometry App 20060289788 - Raymond; Chris ;   et al. | 2006-12-28 |
Apparatuses and methods for enhanced critical dimension scatterometry App 20060285111 - Raymond; Chris ;   et al. | 2006-12-21 |
Apparatus and method for enhanced critical dimension scatterometry App 20060285110 - Raymond; Chris ;   et al. | 2006-12-21 |
Apparatus and method for enhanced critical dimension scatterometry App 20060278834 - Raymond; Chris ;   et al. | 2006-12-14 |
Apparatus and method for enhanced critical dimension scatterometry App 20060273263 - Raymond; Chris ;   et al. | 2006-12-07 |
Apparatus and method for enhanced critical dimension scatterometry App 20060243912 - Raymond; Chris ;   et al. | 2006-11-02 |
Determination of center of focus by parameter variability analysis Grant 7,119,893 - Littau , et al. October 10, 2 | 2006-10-10 |
Determination of center of focus by cross-section analysis Grant 7,110,099 - Littau , et al. September 19, 2 | 2006-09-19 |
Method and device for determining a characteristic of a semicondctor sample App 20060192573 - Srocka; Bernd | 2006-08-31 |
Overlay measurement target App 20060151890 - Smith; Nigel Peter ;   et al. | 2006-07-13 |
Differential numerical aperture methods Grant 7,053,991 - Sandusky May 30, 2 | 2006-05-30 |
Line profile asymmetry measurement using scatterometry Grant 6,856,408 - Raymond February 15, 2 | 2005-02-15 |
Differential numerical aperture methods App 20040246481 - Sandusky, John V. | 2004-12-09 |
Determination of center of focus by parameter variability analysis App 20040233445 - Littau, Michael E. ;   et al. | 2004-11-25 |
Differential numerical aperture methods and device Grant 6,750,968 - Sandusky June 15, 2 | 2004-06-15 |
Structure identification using scattering signatures Grant 6,728,663 - Krukar , et al. April 27, 2 | 2004-04-27 |
Determination of center of focus by diffraction signature analysis Grant 6,606,152 - Littau , et al. August 12, 2 | 2003-08-12 |
Determination of center of focus by diffraction signature analysis Grant 6,429,930 - Littau , et al. August 6, 2 | 2002-08-06 |