| Patent | Date |
|---|
Hermetic Heterogeneous Integration Platform for Active and Passive Electronic Components
App 20220117488 - Padovani; Jose ; et al. | 2022-04-21 |
Micromachined Multi-axis Gyroscopes With Reduced Stress Sensitivity
App 20210372795 - ACAR; Cenk ; et al. | 2021-12-02 |
Micromachined multi-axis gyroscopes with reduced stress sensitivity
Grant 11,085,766 - Acar , et al. August 10, 2 | 2021-08-10 |
Accelerometer techniques to compensate package stress
Grant 10,697,994 - Acar , et al. | 2020-06-30 |
Multi-axis Gyroscope With Reduced Bias Drift
App 20200141732 - ACAR; Cenk ; et al. | 2020-05-07 |
Multi-axis accelerometer with reduced stress sensitivity
Grant 10,393,770 - Acar , et al. A | 2019-08-27 |
Micromachined Multi-axis Gyroscopes With Reduced Stress Sensitivity
App 20190145772 - ACAR; Cenk ; et al. | 2019-05-16 |
Accelerometer Techniques To Compensate Package Stress
App 20180238925 - Acar; Cenk ; et al. | 2018-08-23 |
Micromachined monolithic 3-axis gyroscope with single drive
Grant 10,050,155 - Acar August 14, 2 | 2018-08-14 |
Sealed packaging for microelectromechanical systems
Grant 9,856,132 - Bryzek , et al. January 2, 2 | 2018-01-02 |
Multi-axis Accelerometer With Reduced Stress Sensitivity
App 20170315147 - ACAR; Cenk ; et al. | 2017-11-02 |
Micromachined piezoelectric x-axis gyroscope
Grant 9,605,965 - Acar , et al. March 28, 2 | 2017-03-28 |
MEMS proof mass with split Z-axis portions
Grant 9,599,472 - Acar March 21, 2 | 2017-03-21 |
Multi-die MEMS package
Grant 9,586,813 - Bryzek , et al. March 7, 2 | 2017-03-07 |
Micromachined piezoelectric x-axis gyroscope
Grant 9,459,099 - Acar , et al. October 4, 2 | 2016-10-04 |
Micromachined 3-axis accelerometer with a single proof-mass
Grant 9,455,354 - Acar September 27, 2 | 2016-09-27 |
Micromachined Monolithic 3-axis Gyroscope With Single Drive
App 20160264404 - Acar; Cenk | 2016-09-15 |
Micromachined piezoelectric z-axis gyroscope
Grant 9,410,805 - Acar , et al. August 9, 2 | 2016-08-09 |
Flexure bearing to reduce quadrature for resonating micromachined devices
Grant 9,352,961 - Acar , et al. May 31, 2 | 2016-05-31 |
MEMS multi-axis gyroscope Z-axis electrode structure
Grant 9,278,845 - Acar March 8, 2 | 2016-03-08 |
Micromachined monolithic 6-axis inertial sensor
Grant 9,278,846 - Acar March 8, 2 | 2016-03-08 |
Micromachined monolithic 3-axis gyroscope with single drive
Grant 9,246,018 - Acar January 26, 2 | 2016-01-26 |
Multi-die Mems Package
App 20150321904 - Bryzek; Janusz ; et al. | 2015-11-12 |
Packaging to reduce stress on microelectromechanical systems
Grant 9,156,673 - Bryzek , et al. October 13, 2 | 2015-10-13 |
Multi-die MEMS package
Grant 9,095,072 - Bryzek , et al. July 28, 2 | 2015-07-28 |
Mems Proof Mass With Split Z-axis Portions
App 20150185012 - Acar; Cenk | 2015-07-02 |
MEMS multi-axis accelerometer electrode structure
Grant 9,062,972 - Acar , et al. June 23, 2 | 2015-06-23 |
Micromachined piezoelectric three-axis gyroscope and stacked lateral overlap transducer (slot) based three-axis accelerometer
Grant 9,021,880 - Stephanou , et al. May 5, 2 | 2015-05-05 |
Through silicon via with reduced shunt capacitance
Grant 9,006,846 - Bryzek , et al. April 14, 2 | 2015-04-14 |
Microelectromechanical system device including a metal proof mass and a piezoelectric component
Grant 9,000,656 - Black , et al. April 7, 2 | 2015-04-07 |
MEMS proof mass with split z-axis portions
Grant 8,978,475 - Acar March 17, 2 | 2015-03-17 |
MEMS multi-axis gyroscope with central suspension and gimbal structure
Grant 8,813,564 - Acar August 26, 2 | 2014-08-26 |
Micromachined inertial sensor devices
Grant 8,739,626 - Acar June 3, 2 | 2014-06-03 |
Micromachined devices and fabricating the same
Grant 8,710,599 - Marx , et al. April 29, 2 | 2014-04-29 |
Micromachined Piezoelectric X-axis Gyroscope
App 20140041174 - Acar; Cenk ; et al. | 2014-02-13 |
Micromachined Piezoelectric X-axis Gyroscope
App 20140013557 - Acar; Cenk ; et al. | 2014-01-16 |
Packaging To Reduce Stress On Microelectromechanical Systems
App 20130341737 - Bryzek; Janusz ; et al. | 2013-12-26 |
Micromachined Piezoelectric Z-axis Gyroscope
App 20130333175 - Acar; Cenk ; et al. | 2013-12-19 |
Micromachined Monolithic 3-axis Gyroscope With Single Drive
App 20130328139 - Acar; Cenk | 2013-12-12 |
Micromachined piezoelectric x-axis gyroscope
Grant 8,584,522 - Acar , et al. November 19, 2 | 2013-11-19 |
Flexure Bearing To Reduce Quadrature For Resonating Micromachined Devices
App 20130298671 - Acar; Cenk ; et al. | 2013-11-14 |
Through Silcon Via With Reduced Shunt Capacitance
App 20130277773 - Bryzek; Janusz ; et al. | 2013-10-24 |
Micromachined Monolithic 6-axis Inertial Sensor
App 20130270657 - Acar; Cenk | 2013-10-17 |
Sealed Packaging For Microelectromechanical Systems
App 20130270660 - Bryzek; Janusz ; et al. | 2013-10-17 |
Multi-die Mems Package
App 20130250532 - Bryzek; Janusz ; et al. | 2013-09-26 |
Micromachined 3-axis Accelerometer With A Single Proof-mass
App 20130247666 - Acar; Cenk | 2013-09-26 |
Micromachined piezoelectric z-axis gyroscope
Grant 8,516,887 - Acar , et al. August 27, 2 | 2013-08-27 |
Micromachined piezoelectric X-Axis gyroscope
Grant 8,516,886 - Acar , et al. August 27, 2 | 2013-08-27 |
Mems Proof Mass With Split Z-axis Portions
App 20130192364 - Acar; Cenk | 2013-08-01 |
Mems Multi-axis Accelerometer Electrode Structure
App 20130192369 - Acar; Cenk ; et al. | 2013-08-01 |
Mems Multi-axis Gyroscope Z-axis Electrode Structure
App 20130139592 - Acar; Cenk | 2013-06-06 |
Mems Multi-axis Gyroscope With Central Suspension And Gimbal Structure
App 20130139591 - Acar; Cenk | 2013-06-06 |
Microelectromechanical System Device Including A Metal Proof Mass And A Piezoelectric Component
App 20120234093 - Black; Justin Phelps ; et al. | 2012-09-20 |
Robust six degree-of-freedom micromachined gyroscope with anti-phase drive scheme and method of operation of the same
Grant 8,113,050 - Acar , et al. February 14, 2 | 2012-02-14 |
Micromachined piezoelectric z-axis gyroscope
App 20110265566 - Acar; Cenk ; et al. | 2011-11-03 |
Micromachined piezoelectric X-axis gyroscope
App 20110265565 - Acar; Cenk ; et al. | 2011-11-03 |
Micromachined piezoelectric three-axis gyroscope and stacked lateral overlap transducer (slot) based three-axis accelerometer
App 20110270569 - Stephanou; Philip Jason ; et al. | 2011-11-03 |
Micromachined piezoelectric x-axis gyroscope
App 20110265564 - Acar; Cenk ; et al. | 2011-11-03 |
Micromachined Devices And Fabricating The Same
App 20110031565 - Marx; David Lambe ; et al. | 2011-02-10 |
Micromachined Inertial Sensor Devices
App 20110030473 - Acar; Cenk | 2011-02-10 |
Micromachined torsional gyroscope with anti-phase linear sense transduction
App 20100095768 - Acar; Cenk ; et al. | 2010-04-22 |
Integrated multi-axis micromachined inertial sensing unit and method of fabrication
App 20090282917 - Acar; Cenk | 2009-11-19 |
Robust Six Degree-of-Freedom Micromachined Gyroscope with Anti-Phase Drive Scheme and Mehtod of Operation of the Same
App 20090272189 - Acar; Cenk ; et al. | 2009-11-05 |
Micromachined accelerometer and method with continuous self-testing
App 20090241634 - Acar; Cenk | 2009-10-01 |
Micromachined cross-differential dual-axis accelerometer
App 20090183570 - Acar; Cenk ; et al. | 2009-07-23 |
Dual axis rate sensor
Grant 7,461,552 - Acar December 9, 2 | 2008-12-09 |
Torsional nonresonant z-axis micromachined gyroscope with non-resonant actuation to measure the angular rotation of an object
Grant 7,421,898 - Acar , et al. September 9, 2 | 2008-09-09 |
Nonresonant micromachined gyroscopes with structural mode-decoupling
Grant 7,377,167 - Acar , et al. May 27, 2 | 2008-05-27 |
Dual Axis Rate Sensor
App 20080092652 - Acar; Cenk | 2008-04-24 |
Robust micromachined gyroscopes with two degrees of freedom sense-mode oscillator
Grant 7,284,430 - Acar , et al. October 23, 2 | 2007-10-23 |
Post-release capacitance enhancement in micromachined devices and a method of performing the same
Grant 7,279,761 - Acar , et al. October 9, 2 | 2007-10-09 |
Multi-axis micromachined accelerometer and rate sensor
App 20070220973 - Acar; Cenk | 2007-09-27 |
Torsional rate sensor with momentum balance and mode decoupling
Grant 7,240,552 - Acar , et al. July 10, 2 | 2007-07-10 |
Torsional rate sensor with momentum balance and mode decoupling
Grant 7,228,738 - Acar , et al. June 12, 2 | 2007-06-12 |
Torsional rate sensor with momentum balance and mode decoupling
Grant 7,222,533 - Mao , et al. May 29, 2 | 2007-05-29 |
Robust micromachined gyroscopes with two degrees of freedom sense-mode oscillator
App 20070034005 - Acar; Cenk ; et al. | 2007-02-15 |
Multi-axis micromachined accelerometer
App 20070034007 - Acar; Cenk | 2007-02-15 |
Torsional rate sensor with momentum balance and mode decoupling
App 20060272410 - Mao; Minyao ; et al. | 2006-12-07 |
Torsional rate sensor with momentum balance and mode decoupling
App 20060272411 - Acar; Cenk ; et al. | 2006-12-07 |
Torsional rate sensor with momentum balance and mode decoupling
App 20060272409 - Acar; Cenk ; et al. | 2006-12-07 |
Distributed-mass micromachined gyroscopes operated with drive-mode bandwidth enhancement
Grant 7,100,446 - Acar , et al. September 5, 2 | 2006-09-05 |
Post-release capacitance enhancement in micromachined devices and a method of performing the same
App 20060054983 - Acar; Cenk ; et al. | 2006-03-16 |
Torsional nonresonant z-axis micromachined gyroscope with non-resonant actuation to measure the angular rotation of an object
App 20060032308 - Acar; Cenk ; et al. | 2006-02-16 |
Nonresonant micromachined gyroscopes with structural mode-decoupling
App 20050199061 - Acar, Cenk ; et al. | 2005-09-15 |
Non-resonant four degrees-of-freedom micromachined gyroscope
Grant 6,845,669 - Acar , et al. January 25, 2 | 2005-01-25 |
Non-resonant four degrees-of-freedom micromachined gyroscope
App 20040149035 - Acar, Cenk ; et al. | 2004-08-05 |
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