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Patent applications and USPTO patent grants for Abraham; Susan C..The latest application filed is for "methods and apparatus for etching semiconductor wafers".
Patent | Date |
---|---|
Methods and apparatus for etching semiconductor wafers Grant 6,004,884 - Abraham December 21, 1 | 1999-12-21 |
Methods and apparatus for removing photoresist mask defects in a plasma reactor Grant 5,980,768 - Abraham November 9, 1 | 1999-11-09 |
Methods for reducing etch rate loading while etching through a titanium nitride anti-reflective layer and an aluminum-based metallization layer Grant 5,952,244 - Abraham , et al. September 14, 1 | 1999-09-14 |
Methods and apparatuses for improving photoresist selectivity and reducing etch rate loading Grant 5,883,007 - Abraham , et al. March 16, 1 | 1999-03-16 |
Methods and apparatus for etching semiconductor wafers and layers thereof Grant 5,846,443 - Abraham December 8, 1 | 1998-12-08 |
Mechanism for uniform etching by minimizing effects of etch rate loading Grant 5,772,906 - Abraham June 30, 1 | 1998-06-30 |
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