Patent | Date |
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Laser device and laser device control method Grant 10,971,887 - Abe April 6, 2 | 2021-04-06 |
Laser Device And Laser Device Control Method App 20180351318 - ABE; Tooru | 2018-12-06 |
Extreme ultraviolet light generating apparatus Grant 10,102,938 - Yabu , et al. October 16, 2 | 2018-10-16 |
Extreme Ultraviolet Light Generating Apparatus App 20180240562 - YABU; Takayuki ;   et al. | 2018-08-23 |
Excimer laser apparatus and excimer laser system Grant 9,954,340 - Abe , et al. April 24, 2 | 2018-04-24 |
Excimer Laser Apparatus And Excimer Laser System App 20160322772 - ABE; Tooru ;   et al. | 2016-11-03 |
Excimer laser apparatus and excimer laser system Grant 9,425,576 - Abe , et al. August 23, 2 | 2016-08-23 |
Excimer Laser Apparatus And Excimer Laser System App 20150003485 - ABE; Tooru ;   et al. | 2015-01-01 |
Excimer laser apparatus and excimer laser system Grant 8,867,583 - Abe , et al. October 21, 2 | 2014-10-21 |
Extreme Ultraviolet Light Generation Apparatus App 20140034852 - KAKIZAKI; Kouji ;   et al. | 2014-02-06 |
Extreme ultraviolet light generation apparatus Grant 8,569,722 - Kakizaki , et al. October 29, 2 | 2013-10-29 |
Chamber apparatus, extreme ultraviolet light generation system, and method for controlling the extreme ultraviolet light generation system Grant 8,525,140 - Abe , et al. September 3, 2 | 2013-09-03 |
Extreme ultraviolet light source apparatus, method for controlling extreme ultraviolet light source apparatus, and recording medium with program recorded thereon Grant 8,502,178 - Moriya , et al. August 6, 2 | 2013-08-06 |
Excimer Laser Apparatus And Excimer Laser System App 20130100980 - ABE; Tooru ;   et al. | 2013-04-25 |
Apparatus And Method For Measuring And Controlling Target Trajectory In Chamber Apparatus App 20130062539 - HAYASHI; Hideyuki ;   et al. | 2013-03-14 |
Chamber Apparatus, Extreme Ultraviolet Light Generation System, And Method For Controlling The Extreme Ultraviolet Light Generation System App 20130026393 - ABE; Tooru ;   et al. | 2013-01-31 |
Apparatus and method for measuring and controlling target trajectory in chamber apparatus Grant 8,324,600 - Hayashi , et al. December 4, 2 | 2012-12-04 |
Extreme Ultraviolet Light Source Apparatus, Method For Controlling Extreme Ultraviolet Light Source Apparatus, And Recording Medium With Program Recorded Thereon App 20120175533 - MORIYA; Masato ;   et al. | 2012-07-12 |
Extreme Ultraviolet Light Generation Apparatus App 20110220816 - Kakizaki; Kouji ;   et al. | 2011-09-15 |
Apparatus And Method For Measuring And Controlling Target Trajectory In Chamber Apparatus App 20100294958 - HAYASHI; Hideyuki ;   et al. | 2010-11-25 |
Yeast For Extraction Of Lipid-soluble Component, Method For Producing The Same, Color-improving Agent Using The Same And Method For Producing Lipid-soluble Component App 20090130730 - Abe; Tooru ;   et al. | 2009-05-21 |
Piezoelectric transformer and power converting apparatus employing the same Grant 5,751,092 - Abe May 12, 1 | 1998-05-12 |
Discharge tube driving device and piezoelectric transformer therefor Grant 5,705,879 - Abe , et al. January 6, 1 | 1998-01-06 |
Polymer capacitative moisture sensitive device comprising heating means Grant 5,296,819 - Kuroiwa , et al. March 22, 1 | 1994-03-22 |
Moisture sensitive element and method of manufacturing the same Grant 5,161,085 - Sakai , et al. November 3, 1 | 1992-11-03 |