| Patent | Date |
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Substrate Processing Apparatus And Abnormality Detection Method
App 20220285197 - CHIHAYA; Hiroaki ; et al. | 2022-09-08 |
Substrate Processing Apparatus And Abnormality Detection Method
App 20220285182 - CHIHAYA; Hiroaki ; et al. | 2022-09-08 |
Holder Temperature Detection Method, Holder Monitoring Method And Substrate Processing Apparatus
App 20220236202 - ABARRA; Einstein Noel ; et al. | 2022-07-28 |
Sputtering Apparatus And Method Of Controlling Sputtering Apparatus
App 20220208534 - SHINADA; Masato ; et al. | 2022-06-30 |
Film Forming Apparatus, Film Forming System, And Film Forming Method
App 20220081757 - Shinada; Masato ; et al. | 2022-03-17 |
Sputtering Apparatus And Film Forming Method
App 20220044920 - ABARRA; Einstein Noel ; et al. | 2022-02-10 |
Apparatus And Method For Performing Sputtering Process
App 20220025511 - SHINADA; Masato ; et al. | 2022-01-27 |
Film forming apparatus and film forming method
Grant 11,220,741 - Abarra January 11, 2 | 2022-01-11 |
Film forming apparatus and film forming method
Grant 11,174,547 - Abarra November 16, 2 | 2021-11-16 |
Film Thickness Measuring Apparatus And Film Thickness Measuring Method, And Film Forming System And Film Forming Method
App 20210285096 - SHINADA; Masato ; et al. | 2021-09-16 |
Cathode Unit And Film Forming Apparatus
App 20210257198 - SHINADA; Masato ; et al. | 2021-08-19 |
Film Formation Device And Film Formation Method
App 20210118653 - SHINADA; Masato ; et al. | 2021-04-22 |
Film Forming System, Magnetization Characteristic Measuring Device, And Film Forming Method
App 20210082777 - CHIHAYA; Hiroaki ; et al. | 2021-03-18 |
Target Structure And Film Forming Apparatus
App 20210020419 - ABARRA; Einstein Noel | 2021-01-21 |
Substrate Placement Mechanism, Film Forming Apparatus, And Film Forming Method
App 20200093027 - Abarra; Einstein Noel | 2020-03-19 |
Film Forming Apparatus And Film Forming Method
App 20190352771 - Abarra; Einstein Noel | 2019-11-21 |
Apparatus and method for processing substrate using ion beam
Grant 10,062,545 - Kamiya , et al. August 28, 2 | 2018-08-28 |
Magnet unit and magnetron sputtering apparatus
Grant 9,911,526 - Endo , et al. March 6, 2 | 2018-03-06 |
Ion beam generator and ion beam plasma processing apparatus
Grant 9,422,623 - Abarra , et al. August 23, 2 | 2016-08-23 |
Apparatus And Method For Processing Substrate Using Ion Beam
App 20160189925 - KAMIYA; Yasushi ; et al. | 2016-06-30 |
Substrate processing apparatus
Grant 9,355,878 - Abarra , et al. May 31, 2 | 2016-05-31 |
Apparatus and method for processing substrate using ion beam
Grant 9,312,102 - Kamiya , et al. April 12, 2 | 2016-04-12 |
Magnet Unit And Manetron Sputtering Apparatus
App 20150235751 - ENDO; TETSUYA ; et al. | 2015-08-20 |
Magnet unit and magnetron sputtering apparatus
Grant 9,058,962 - Endo , et al. June 16, 2 | 2015-06-16 |
Sputtering apparatus
Grant 8,999,121 - Sugi , et al. April 7, 2 | 2015-04-07 |
Cooling system
Grant 8,776,542 - Endo , et al. July 15, 2 | 2014-07-15 |
Magnetron sputtering cathode, magnetron sputtering apparatus, and method of manufacturing magnetic device
Grant 8,778,150 - Endo , et al. July 15, 2 | 2014-07-15 |
Ion Beam Generator And Ion Beam Plasma Processing Apparatus
App 20140124363 - ABARRA; Einstein Noel ; et al. | 2014-05-08 |
Substrate Processing Apparatus
App 20140105709 - ABARRA; Einstein Noel ; et al. | 2014-04-17 |
Magnet unit and magnetron sputtering apparatus
Grant 8,673,124 - Endo , et al. March 18, 2 | 2014-03-18 |
Ion beam generator, and substrate processing apparatus and production method of electronic device using the ion beam generator
Grant 8,536,539 - Hirayanagi , et al. September 17, 2 | 2013-09-17 |
Magnetic sensor stack body, method of forming the same, film formation control program, and recording medium
Grant 8,507,113 - Abarra , et al. August 13, 2 | 2013-08-13 |
Ion beam generator
Grant 8,378,576 - Abarra , et al. February 19, 2 | 2013-02-19 |
Substrate Cooling Device, Sputtering Apparatus And Method For Manufacturing Electronic Device
App 20120193216 - ENDO; Tetsuya ; et al. | 2012-08-02 |
Magnet Unit And Magnetron Sputtering Apparatus
App 20120160673 - Endo; Tetsuya ; et al. | 2012-06-28 |
Apparatus And Method For Processing Substrate Using Ion Beam
App 20120145535 - KAMIYA; Yasushi ; et al. | 2012-06-14 |
Ion Beam Generating Apparatus, Substrate Processing Apparatus And Method Of Manufacturing Electronic Device
App 20120104274 - Hirayanagi; Hirohisa ; et al. | 2012-05-03 |
Magnetic Sensor Stack Body, Method Of Forming The Same, Film Formation Control Program, And Recording Medium
App 20120070693 - Abarra; Einstein Noel ; et al. | 2012-03-22 |
Inline-type wafer conveyance device
Grant 8,092,139 - Watanabe , et al. January 10, 2 | 2012-01-10 |
Magnet Unit And Magnetron Sputtering Apparatus
App 20110297537 - Endo; Tetsuya ; et al. | 2011-12-08 |
Sputtering Apparatus
App 20110272278 - Sugi; Kyosuke ; et al. | 2011-11-10 |
Substrate processing apparatus and cleaning method of the same
Grant 8,053,747 - Abarra , et al. November 8, 2 | 2011-11-08 |
Magnet unit and magnetron sputtering apparatus
Grant 8,048,277 - Endo , et al. November 1, 2 | 2011-11-01 |
Film forming method by sputtering and sputtering apparatus thereof
Grant 8,043,483 - Endo , et al. October 25, 2 | 2011-10-25 |
Inline-type wafer conveyance device
Grant 8,016,537 - Watanabe , et al. September 13, 2 | 2011-09-13 |
Cooling System
App 20110155569 - ENDO; Tetsuya ; et al. | 2011-06-30 |
Ion Beam Generator, and Substrate Processing Apparatus and Production Method of Electronic Device Using The Ion Beam Generator
App 20110147200 - Hirayanagi; Hirohisa ; et al. | 2011-06-23 |
Ion Beam Generator
App 20110139998 - ABARRA; Einstein Noel ; et al. | 2011-06-16 |
Sputtering apparatus and film deposition method
Grant 7,955,480 - Endo , et al. June 7, 2 | 2011-06-07 |
Inline-type Wafer Conveyance Device
App 20100239394 - Watanabe; Naoki ; et al. | 2010-09-23 |
Magnetron Sputtering Cathode, Magnetron Sputtering Apparatus, And Method Of Manufacturing Magnetic Device
App 20100213048 - Endo; Tetsuya ; et al. | 2010-08-26 |
Inline-type Wafer Conveyance Device
App 20100215460 - Watanabe; Naoki ; et al. | 2010-08-26 |
Inline-type Wafer Conveyance Device
App 20100189532 - Watanabe; Naoki ; et al. | 2010-07-29 |
Sputtering Apparatus And Film Deposition Method
App 20100155229 - ENDO; TETSUYA ; et al. | 2010-06-24 |
Sputtering Apparatus And Film Forming Method
App 20100155227 - Endo; Tetsuya ; et al. | 2010-06-24 |
Film Forming Method By Sputtering And Sputtering Apparatus Thereof
App 20100133090 - Endo; Tetsuya ; et al. | 2010-06-03 |
Thin Film Formation Apparatus And Magnetic Recording Medium Manufacturing Method
App 20100108495 - ABARRA; Einstein Noel | 2010-05-06 |
Sputtering Apparatus, Thin Film Formation Apparatus, And Magnetic Recording Medium Manufacturing Method
App 20100108496 - ABARRA; EINSTEIN NOEL | 2010-05-06 |
Substrate Processing Apparatus And Cleaning Method Of The Same
App 20100096568 - ABARRA; Einstein Noel ; et al. | 2010-04-22 |
Magnet Assembly Capable Of Generating Magnetic Field Having Direction That Is Uniform And Can Be Changed And Sputtering Apparatus Using The Same
App 20090078571 - Abarra; Einstein Noel ; et al. | 2009-03-26 |
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