Patent | Date |
---|
Supply system for an extreme ultraviolet light source Grant 10,904,994 - Winkels , et al. January 26, 2 | 2021-01-26 |
Droplet generator for lithographic apparatus, EUV source and lithographic apparatus Grant 10,750,604 - Dijksman , et al. A | 2020-08-18 |
Supply System For An Extreme Ultraviolet Light Source App 20200128657 - Winkels; Koen Gerhardus ;   et al. | 2020-04-23 |
Supply system for an extreme ultraviolet light source Grant 10,499,485 - Winkels , et al. De | 2019-12-03 |
Droplet generator for lithographic apparatus, EUV source and lithographic apparatus Grant 10,481,498 - Dijksman , et al. Nov | 2019-11-19 |
Control system, positioning system, lithographic apparatus and device manufacturing method Grant 10,401,743 - De Best , et al. Sep | 2019-09-03 |
Control system, positioning system, lithographic apparatus and device manufacturing method Grant 10365567 - | 2019-07-30 |
Droplet Generator For Lithographic Apparatus, Euv Source And Lithographic Apparatus App 20180364580 - Dijksman; Johan Frederik ;   et al. | 2018-12-20 |
Supply System For An Extreme Ultraviolet Light Source App 20180368242 - Winkels; Koen Gerhardus ;   et al. | 2018-12-20 |
Droplet Generator For Lithographic Apparatus, Euv Source And Lithographic Apparatus App 20180368241 - DIJKSMAN; Johan Frederik ;   et al. | 2018-12-20 |
Control system, positioning system, lithographic apparatus, control method, device manufacturing method and control program Grant 10,095,123 - Van De Wal , et al. October 9, 2 | 2018-10-09 |
Object positioning system, control system, lithographic apparatus, object positioning method and device manufacturing method Grant 9,927,721 - Butler , et al. March 27, 2 | 2018-03-27 |
Stage positioning system and lithographic apparatus Grant 9,897,926 - Aangenent , et al. February 20, 2 | 2018-02-20 |
Control System, Positioning System, Lithographic Apparatus, Control Method, Device Manufacturing Method And Control Program App 20170212431 - VAN DE WAL; Marinus Maria Johannes ;   et al. | 2017-07-27 |
Lithographic apparatus, substrate support system, device manufacturing method and control program Grant 9,715,182 - Van De Wal , et al. July 25, 2 | 2017-07-25 |
Object Positioning System, Control System, Lithographic Apparatus, Object Positioning Method And Device Manufacturing Method App 20170199468 - BUTLER; Hans ;   et al. | 2017-07-13 |
Stage Positioning System And Lithographic Apparatus App 20170010543 - AANGENENT; Wilhelmus Henricus Theodorus Maria ;   et al. | 2017-01-12 |
Lithographic apparatus and device manufacturing method Grant 9,507,277 - Aangenent , et al. November 29, 2 | 2016-11-29 |
Lithographic apparatus and device manufacturing method Grant 9,494,869 - Butler , et al. November 15, 2 | 2016-11-15 |
Positioning system, lithographic apparatus and device manufacturing method Grant 9,383,659 - Beerens , et al. July 5, 2 | 2016-07-05 |
Lithographic Apparatus, Substrate Support System, Device Manufacturing Method And Control Program App 20150316860 - VAN DE WAL; Marinus Maria Johannes ;   et al. | 2015-11-05 |
Lithographic apparatus and method Grant 9,141,004 - Vermeulen , et al. September 22, 2 | 2015-09-22 |
Variable reluctance device, stage apparatus, lithographic apparatus and device manufacturing method Grant 9,081,307 - Hol , et al. July 14, 2 | 2015-07-14 |
Positioning System, Lithographic Apparatus And Device Manufacturing Method App 20150168852 - Beerens; Ruud Antonius Catharina Maria ;   et al. | 2015-06-18 |
Lithographic Apparatus And Device Manufacturing Method App 20140340666 - Butler; Hans ;   et al. | 2014-11-20 |
Lithographic Apparatus And Device Manufacturing Method App 20130335722 - Aangenent; Wilhelmus Henricus Theodorus Maria ;   et al. | 2013-12-19 |
Lithographic Apparatus And Method App 20120249987 - Vermeulen; Johannes Petrus Martinus Bernardus ;   et al. | 2012-10-04 |
Variable Reluctance Device, Stage Apparatus, Lithographic Apparatus and Device Manufacturing Method App 20120019794 - HOL; Sven Antoin Johan ;   et al. | 2012-01-26 |